Process for producing ultra-pure water and process for using said ultra-pure water

A process for producing ultra-pure water which comprises boiling raw water to vaporize off volatile components from the raw water, subsequently generating steam from the boiled water from which said volatile components have previously been removed, contacting the steam with a hydrophobic, porous, gas-permeable and liquid-impermeable membrane to make the steam permeate the membrane and removing liquid mist sufficient to produce a high purity steam substantially free of impurities, leading the steam having permeated the membrane into an atmosphere of saturated steam or inert gas, and condensing the steam in said atmosphere to form ultra-pure water.

A process for producing ultra-pure water by generating steam from raw water, making the steam permeate a hydrophobic, porous, gas-permeable and liquid-impermeable membrane removing liquid mist sufficient to produce high purity steam substantially free of impurities, and then condensing the steam, which comprises a step for heating and boiling the raw water to vaporize off volatile components and a step for generating steam from the raw water from which said volatile components been removed by having completed the preceding step and contacting the steam with said hydrophobic porous membrane to form ultra-pure water.

A process for producing ultra-pure water by generating steam from raw water, making the steam permeate a hydrophobic, porous, gas-permeable and liquid impermeable membrane removing liquid mist sufficient to produce high purity steam substantially free of impurities, and then condensing the steam;

• which comprises a step for boiling the raw water to vaporize off volatile components while keeping the raw water under a reduced pressure and a step for generating steam from the raw water from which said volatile components have been removed by having completed the preceding step and contacting the steam with said hydrophobic porous membrane to form ultra-pure water.

A process for producing ultra-pure water which comprises boiling a raw water containing volatile components and nonvolatile components to vaporize off the volatile components, subsequently generating steam from the boiled raw water from which said volatile components have previously been removed, contacting only the steam with a hydrophobic, porous, gas-permeable and liquid-impermeable membrane to make the steam permeate the membrane and removing liquid mist sufficient to produce a high purity steam substantially free of impurities, and then condensing the steam to form ultra-pure water.

A process for producing ultra-pure water which comprises boiling a raw water containing volatile components and nonvolatile components to vaporize off the volatile components, subsequently heating the boiled raw water from which said volatile components have previously been removed to generate steam, contacting only the steam with a hydrophobic, porous, gas-permeable and liquid-impermeable membrane to make the steam permeate the membrane and removing liquid mist sufficient to produce a high purity steam substantially free of impurities, leading the steam having permeated the membrane into an atmosphere of saturated steam or inert gas, and condensing the steam in said atmosphere to form ultra-pure water.

A process for producing ultra-pure water which comprises heating a raw water containing volatile and volatile and nonvolatile components to vaporize off the volatile components, subsequently again heating the raw water from which said volatile components have previously been removed to generate steam, contacting only the steam with a hydrophobic porous gas-permeable and liquid-impermeable membrane to make the steam permeate the membrane and removing liquid mist sufficient to produce a high purity steam substantially free of impurities, and then condensing the steam to provide ultra-pure water to form ultra-pure water.

A process for producing ultra-pure water which comprises heating and boiling a raw water containing volatile components and nonvolatile components to vaporize off the volatile components, subsequently again heating the raw water from which said volatile components have previously been removed to generate steam, contacting only the steam with a hydrophobic, porous, gas-permeable and liquid permeable membrane to make the steam permeate the membrane and removing liquid mist sufficient to produce a high purity steam substantially free of impurities, leading the steam having permeated the membrane into an atmosphere of saturated steam or inert gas, and then condensing the steam in said atmosphere to form ultra-pure water.

A process for producing ultra-pure water which comprises a step for heating and boiling a raw water containing volatile components and nonvolatile components to vaporize off the volatile components and a subsequent step for again heating the raw water from which said volatile components have previously been removed to generate steam by using a steam containing the vaporized volatile components obtained in the preceding step as a heat source, contacting only the generated steam with a hydrophobic, porous, gas-permeable and liquid impermeable membrane to make the steam permeate the membrane and removing liquid mist sufficient to produce a high purity steam substantially free of impurities and then condensing the steam to form ultra-pure water.

A process for producing ultra-pure water which comprises a step for heating and boiling a raw water containing volatile components and nonvolatile components to vaporize off the volatile components and a subsequent step for again heating the raw water from which said volatile components have previously been removed to generate steam by using a steam containing the vaporized volatile components formed in the preceding step as a heat source, contacting only the generated steam with a hydrophobic, porous, gas-permeable and liquid impermeable membrane to make the steam permeate the membrane and removing liquid mist sufficient to produce a high purity steam substantially free of impurities, leading the steam having permeated the membrane into an atmosphere of saturated steam or inert gas and condensing the steam in said atmosphere to form ultra-pure water.

A process for producing ultra-pure water which comprises generating steam from a raw water previously freed of volatile components by heating outside of a clean room for isolating the used point of ultra-pure water of the outer atmosphere, subsequently transporting the generated steam into the clean room in a gaseous state and condensing it by means of a condenser provided in the neighborhood of the used point and equipped with a hydrophobic porous membrane for removing liquid mist from said steam to provide ultra-pure water.