Vacuum pump
AssigneeSeiki Seiki Kabushiki Kaisha
InventorMasaharu Miki
Life of this patent
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Abstract
A vacuum pump producing ultra high vacua has a housing containing a first set of rotor blades provided around a first rotor for producing ultra high vacua and a second set of rotor blades provided around a second rotor for producing low to high vacua wherein the first rotor and the second rotor are magnetically suspended during pump operation. The first rotor is disconnected from the second rotor during pump operation in a low to high vacuum range, and it is connected with the second rotor as the pump operation shifts from a high vacuum range to an ultra high vacuum range. Because of this feature, the pump operation ranging from a low vacuum range up to an ultra high vacuum range can be performed by a single pump.
Claims11
A pump for producing ultra high vacuum comprising:
- a housing;
- a first rotor within said housing having a first set of rotor blades disposed around said first rotor for coaxial with said first rotor within said housing producing ultra high vacuum;
- a second rotor having a second set of rotor blades disposed around said second rotor for producing relatively low to high vacuum;
- magnetic suspension means for magnetically suspending said first rotor and said second rotor for rotation with said housing;
- a motor for rotationally driving at least said second rotor;
- and magnetic clutch means for coupling said first rotor and said second rotor when a predeterminined level of vacuum is reached.
A pump for producing an ultra high vacuum comprising:
- a housing;
- first and second coaxial rotors rotatably mounted within said housing, said first rotor being rotatable within a high vacuum portion of said housing and said second rotor being rotatable within a relatively lower vacuum portion of said housing;
- means for magnetically suspending said first and second rotors for rotation within said housing;
- means for detecting the relative axial positions of said first and second rotors;
- magnetic means located on proximal ends of said first and second rotors for producing an attractive magnetic interaction therebetween so as to engage said rotors together;
- and
- electromagnetic means located respectively on proximal ends of said first and second rotors for periodically producing a repelling magnetic interaction therebetween so as to disengage said rotors.
Dependencies are inferred from the claim text.