Electrochemical microsensors and method of making such sensors

A multi-sensor device comprising electrochemical microsensors having

• a substrate containing microelectronic means for sensing potential or current;
• a micromachined structure having opening extending into a cavity therein from opposite sides of the structure, wherein said structure has been produces by photolithographic transfer of a two dimensional pattern onto a material to form a three dimensional structure following selective removal of the material, and;
• wherein the cavity containing-structure has been positioned over the substrate so that an opening into the cavity extends over the sensing means and the cavity containing structure has been adhered to the substrate using a process which simultaneously adheres multiple structures to substrates as a single unit, with an adhesive forming a seal between the substrate and structure at a temperature less than approximately 400.degree. C.;
• and
• a chemically sensitive material within the cavity;
• wherein the electrochemical microsensors contain materials having chemical sensitivities to different chemical species.

A method for manufacturing a chemical microsensor comprising:

• (i) providing a substrate containing microelectronic means for sensing potential or current;
• (ii) providing a micromachined structure having openings extending into a cavity therein from opposite sides of the structure, wherein said structure has been produced by photolithographic transfer of a two dimensional pattern onto a material to form a three dimensional structure following selective removal of the material, and;
• (iii) positioning the structure containing the cavity over the substrate wherein an opening into the cavity extends over the sensing means;
• and
• (iv) using a process to adhere the cavity containing structure to the substrate which simultaneously adheres multiple structures to substrates as a single unit, at a temperature less than approximately 400.degree. C.