US 4,873,467 AGranted

Ion source with particular grid assembly

OwnerHarold R. Kaufman, Raymond S. Robinsoninventors

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Abstract

An ion source has the typical chamber wherein ions are produced and caused to be propelled outwardly through at least a pair of grids which have a mutually-aligned respective plurality of apertures. Thus, there are the usual cathode, anode, magnet assembly, ionizable gas inlet and supporting power supplies as well as neutralizing means. First and second grids each have an integrally-formed peripheral marginal portion. A support element has a shape which matches and overlies the marginal portion of one grid, while a clamp has a shape which matches that of and overlies the other marginal portion. The support element and clamp are secured together. First and second mutually-aligned seats are successively spaced around the respective marginal portions. A plurality of insulators, each having of circular cross-section, are individually seated between the two different marginal portions in a manner to cause general alignment while enabling radial movement due to thermal expansion of the marginal portions relative to the support element and the clamp and each other.

Claims17

Dependent claims

In an ion source having a chamber wherein ions are produced and propelled outwardly through at least a pair of grids having a mutually-aligned respective plurality of apertures, a grid assembly comprising:

first and second grids each of conductive material having an integrally-formed peripheral marginal portion and having, inside said marginal portion, an array of apertures distributed in a predetermined pattern;
a support element having a shape which matches that of and is mounted over the side of the marginal portion of said first grid facing away from said second grid;
a clamp having a shape which matches that of and is mounted over the side of the marginal portion of said second grid facing away from said first grid;
means for securing said clamp to said support element with said marginal portions sandwiched thereinbetween and respectively positioned to mutually align the respective ones of said apertures in said first and second grids;
means defining a first and second mutually aligned series of seats successively spaced around respective ones of said marginal portions;
and means, including a plurality of insulators each having a circular cross section and individually seated in and between corresponding ones of said first and second series of seats, for enabling radial movement of said marginal portions relative to each other and relative to said support element and said clamp.

3 more elements

Dependencies are inferred from the claim text.