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US 4,869,923 AGranted
Microwave enhanced CVD method for depositing carbon
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorShunpei Yamazaki
Life of this patent
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Abstract
A method of making a diamond or diamond-like carbon containing 0.01-1.0 weight percent nitrogen on a substrate where an electromagnetic energy is applied to a productive gas comprising carbon and an additive gas comprising nitrogen and the above carbon product is deposited on a substrate.
Claims14
A method of making a diamond or diamond-like carbon containing 0.01 -1.0 weight percent nitrogen on a substrate comprising:
- placing said substrate in a reaction chamber;
- inputting a productive gas comprising carbon together with an additive gas comprising nitrogen into said reaction chamber;
- applying an electromagnetic energy to activate said productive and additive gases;
- and
- depositing said carbon product containing nitrogen on a surface of said substrate.
2 more elements
Dependencies are inferred from the claim text.