Substrates with dense metal vias
AssigneeCeramics Process Systems Corporation
InventorsBrian C. Foster, Roger S. Lind
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Abstract
Dense vias may be made with a metallizing composition containing tungsten, alumina, and either nickel or palladium. Further, an infiltration process ensures that vias in ceramic substrates are heremetic. Infiltrating materials, including metals and alloys, are applied to co-fired substrates and the composite is fired. The process may be repeated if necessary. Alternatively, the via holes may be bore-coated prior to infiltrating.
Claims24
A green ceramic body having a substrate with a plurality of via holes, wherein the substrate is composed of alumina, an alumina-based composite, aluminum nitride, beryllia, silicon carbide, or zirconia, and the via holes contain a composition with inorganic constituents consisting essentially of, by weight:
- ______________________________________ tungsten 85-97% alumina 2-8% ______________________________________
- and 1-7% of a metal selected from the group consisting of nickel and palladium, the via holes substantially free of glassy fillers.
A fired composite substrate comprising a ceramic and metallized vias, wherein the substrate is composed of alumina, an alumina-based composite, aluminum nitride, beryllia, silicon carbide, or zirconia, and the vias consist essentially of, by weight:
- ______________________________________ tungsten 85-97% alumina 2-8% ______________________________________
- and 1-7% of a metal selected from the group consisting of nickel and palladium,
- the vias substantially free of glassy fillers.
A ceramic composite comprising:
- (a) a ceramic substrate having less than 1 wt. % of glassy phase and composed of alumina, an alumina-based composite, aluminum nitride, beryllia, silicon carbide, or zirconia, said substrate defining a plurality of vias;
- and
- (b) a conductive material selected from the group consisting of tungsten, molybdenum, and mixtures thereof in association with an infiltrant metal or alloy in at least one via, the vias substantially free of a glassy phase.
A ceramic composite, comprising:
- (a) a ceramic substrate substantially free of a glassy phase and composed of alumina, an alumina-based composite, aluminum nitride, beryllia, silicon carbide, or zirconia, said substrate defining a plurality of bore-coated vias, the vias coated with a conductive material selected from the group consisting of tungsten, molybdenum, and mixtures thereof;
- and
- (b) an infiltrant metal or alloy in association with at least one bore-coated via, the vias substantially free of glassy fillers.
Dependencies are inferred from the claim text.