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US 4,860,300 AGranted
Electrode for pulsed gas lasers
AssigneeLambda Physik Forschungs- und Entwicklungsgesellschaft MB
InventorsJurgen Baumler, Manfred Zeh
Life of this patent
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Abstract
An electrode for pulsed gas lasers consisting substantially of tungsten and copper has a long life. With such an electrode contaminations of the laser gas and of the windows are largely obviated, even in long-time operation. An electrode suitable also for fluoride-containing laser gases consists essentially of an alloy containing copper, aluminium and nickel.
Claims3
In an excimer laser, having at least two electrodes exposed to an excimer gas mixture, the laser wherein:
- said electrodes each comprise substantially copper and tungsten;
- and
- said excimer gas mixture is substantially free of fluorides.
Dependencies are inferred from the claim text.