US 4,860,224 A · Surface analysis spectroscopy apparatus

Abstract

In an apparatus for surface analysis microscopy, a number of analysis device are mounted on an ultra-high vacuum chamber. The devices include a beam source of locally heating a selected region of a specimen and a temperature-detector for monitoring the heating of the selected region, as well as an electron gun and an analyzer for detecting emission from a specimen region subjected to electron bombardment. An ion gun may also be provided. The apparatus enables thermal microscopy of a specimen to be carried out in conjunction with other surface analysis techniques including, inter alia, scanning electron microscopy and Auger electron microscopy, within a single apparatus and during a single experimental operation. A novel configuration of cylindrical mirror analyser facilitates mounting a multiplicity of analysis devices on the chamber in a compact manner for studying a specimen at a single position.

Claims19

Dependent claims

Surface analysis apparatus comprising:

(a) a substantially hermetically sealable chamber;
(b) means for establishing an ultra-high vacuum environment in said chamber;
(c) means for supporting a test specimen within said chamber when ultra-high vacuum conditions prevail therein;
(d) a plurality of means for directing a beam at said test specimen for transfer of energy thereto, at least one of said plurality of beam-directing means adapted to direct a beam at a selected surface region of said test specimen for transfer of energy to said selected surface region;
(e) means for detecting emissions from said test specimen when excited by energy transfer thereto, said emissions detecting means including means for establishing the temperature of said selected surface region when excited by energy transfer to said selected surface region from said beam of said at least one of said plurality of beam-directing means;
and
(f) means for analysing said emissions to provide data indicative of at least surface properties of said test specimen.

4 more elements

A cylindrical mirror analyser comprising at least one source of primary radiation for initiating a primary radiation beam, means for focussing said primary radiation beam substantially at a specimen position located substantially on the longitudinal axis of the analyser, port means for admission of a beam from a beam source to the analyser, and means for permitting said beam from said beam source to be focussed substantially at said specimen position, wherein at least one of said at least one source of primary radiation and said port means is disposed so that a beam passing through the analyser from said at least one of said at least one source of primary radiation and said port means is initially directed along a radial axis extending at substantially 90.degree. to said longitudinal axis, and the analyser also comprises means for diverting said beam from said radial axis onto said longitudinal axis for focussing substantially at said specimen position.

Dependencies are inferred from the claim text.

Surface analysis spectroscopy apparatus

Life of this patent

Surface analysis spectroscopy apparatus

Life of this patent

Abstract

Claims19