Method of forming bump electrode and electronic circuit device
AssigneeKabushiki Kaisha Toshiba
InventorsMasayuki Saito, Akira Niitsuma, Hirosi Ohdaira, Chiaki Tanuma, Miki Mori
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AssigneeKabushiki Kaisha Toshiba
InventorsMasayuki Saito, Akira Niitsuma, Hirosi Ohdaira, Chiaki Tanuma, Miki Mori
Estimating the term…
A support is formed and comprises a base, a resin layer which is formed on the base and on recesses which are formed on a surface of the base, and a conductive layer which is formed on a portion of a surface of the resin layer, other than where the recesses are formed. The surface of the recesses is electrically charged by way of a corona discharge to create static electricity in the recesses. Metal balls to be formed into bump electrodes are held in the recesses by way of the static electricity. Then, each of the metal balls is bonded to a corresponding electrode terminal of an electronic component by hot press unit while the electronic component is opposed to the support.
A method of forming a bump electrode on an electrode terminal of an electronic component, comprising the steps of:
A method of forming a bump electrode on an electrode terminal of an electronic component including a semiconductor element, comprising the steps of:
A method of forming a bump electrode on an electrode terminal of an electronic component, comprising the steps of:
A method of manufacturing an electronic circuit device, comprising the steps of:
Dependencies are inferred from the claim text.