Apparatus for measuring an adhesion force of a thin film
AssigneeNEC Corporation
InventorYuji Tsukamoto
Life of this patent
Estimating the term…
Abstract
An apparatus for measuring the adhesion force of a thin film deposited on a substrate of a specimen. The apparatus comprises an inclining mechanism for mounting a sample dish with a specimen inclined by a predetermined angle with respect to the sample dish, an indentor disposed above the specimen for deforming the specimen by indentation, a driver for driving the indentor perpendicular to the sample dish, a load transducer for measuring a load applied to the specimen by the indentor, a sensor for sensing propagation of a crack produced in the specimen by the load, a displacement gage interlocked with the driver for measuring a penetration depth of the indentor, and a measuring mechanism for measuring the adhesion force of the thin film to the substrate.
Claims12
An apparatus for measuring an adhesion force of a thin film, comprising:
- an inclining mechanism for mounting a sample dish with a specimen including a substrate and a thin film deposited on said substrate, said specimen being inclined by a predetermined angle with respect to said sample dish;
- an indenter disposed above said specimen for deforming said specimen by indentation;
- a driver for driving said indenter perpendicularly to said sample dish;
- a load transducer for measuring a load applied to said specimen by said indenter;
- a sensor for sensing propagation of a crack produced in said specimen by said load;
- a displacement gauge interlocked with said driver for measuring a penetration depth of said indenter;
- and
- measuring means for measuring said adhesion force of said thin film to said substrate on the basis of said load and said penetration depth at a time when said sensor produces a sense signal and said predetermined angle.
An apparatus for determining an adhesion force of a thin film of a substrate, the apparatus comprising:
- a sample dish;
- an inclining mechanism mounted on said sample dish and inclining the specimen by a predetermined angle with respect to said sample dish;
- an indenter disposed above the specimen for deforming the specimen by indentation;
- a driver connected to the indenter for driving the indenter against the specimen, thereby applying a load to the specimen;
- a load transducer for measuring the load applied to the specimen by said indenter, said sample dish being mounted on said load transducer;
- an acoustic emission transducer for sensing propagation of a crack produced in the specimen by the load;
- a displacement gauge cooperatively arranged with said driver for measuring a penetration depth of said indenter;
- and
- measuring means coupled to said load transducer and said acoustic emission transducer for measuring the adhesion force of the thin film.
Dependencies are inferred from the claim text.