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US 4,853,627 AGranted
Wafer probes
AssigneeTriQuint Semiconductor, Inc.
InventorsKimberly R. Gleason, Eric W. Strid, Robert T. Flegal, Angus J. McCamant
Life of this patent
Estimating the term…
Abstract
A wafer probe comprises a support member having an end region which is shaped to permit the end region to be brought into close proximity with a component under test. An amplifier is mounted on the support member at its end region. A conductive probe element is attached to the amplifier and is electrically connected to the amplifier's input terminal. A transmission line is connected to the amplifier's output terminal for transmitting signals from the amplifier to a measurement instrument.
Claims20
A wafer probe comprising:
- a planar, generally triangular plate-form support member having first and second opposite main faces and having an end region at a smaller end thereof which is shaped to permit said end region to be brought into close proximity with a component under test,
- an amplifier mounted on the support member at said end region and having an input terminal, an output terminal and first and second power supply terminals,
- a conductive probe element attached to the amplifier and electrically connected to said input terminal,
- a transmission line mounted on said planar support member and connected to the output terminal for transmitting signals from the amplifier to a measurement instrument, said transmission line being formed by a strip of conductive material deposited on the first main face of the support member and a layer of electrically conductive material deposited on the second main face of the support member in electrically insulating relationship with respect to said strip,
- first and second conductors for connecting the power supply terminals respectively to a power supply, said first and second conductors comprising strips of conductive material deposited on the first main face of the support member, and
- by-pass capacitors spaced from said end region of the support member and connected between said first and second conductors and said layer of electrically conductive material.
3 more elements
A wafer probe comprising:
- a planar support member having an end region that is shaped to permit the end region to be brought into close proximity with a component under test, and a support region that is spaced from said end region,
- an electronic circuit mounted on the support member at the end region thereof and having an input terminal, an output terminal and first and second power supply terminals,
- a conductive probe element attached to the electronic circuit and electrically connected to said input terminal,
- a transmission line connected to the output terminal and extending to said support region for transmitting signals from the electronic circuit to a measurement instrument, and
- first and second power-supply transmission lines connected to the power supply terminals respectively and extending from those terminals to said support region of the planar support member.
2 more elements
Dependencies are inferred from the claim text.