US 4,853,148 AGranted

Process and composition for drying of gaseous hydrogen halides

AssigneeAdvanced Technology Materials, Inc.

InventorsGlenn M. Tom, Duncan W. Brown

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Abstract

A process for drying a gaseous hydrogen halide of the formula HX, wherein X is selected from the group consisting of bromine, chlorine, fluorine, and iodine, to remove water impurity therefrom, comprising: contacting the water impurity-containing gaseous hydrogen halide with a scavenger including a support having associated therewith one or more members of the group consisting of: (a) an active scavenging moiety selected from one or more members of the group consisting of: (i) metal halide compounds dispersed in the support, of the formula MX.sub.y ; and (ii) metal halide pendant functional groups of the formula -MX.sub.y-1 covalently bonded to the support, wherein M is a y-valent metal, and y is an integer whose value is from 1 to 3; (b) corresponding partially or fully alkylated compounds and/or pendant functional groups, of the metal halide compounds and/or pendant functional groups of (a); wherein the alkylated compounds and/or pendant functional groups, when present, are reactive with the gaseous hydrogen halide to form the corresponding halide compounds and/or pendant functional groups of (a); and M being selected such that the heat of formation, .DELTA.H.sub.f of its hydrated halide, MX.sub.y.(H.sub.2 O).sub.n, is governed by the relationship: .DELTA.H.sub.f .gtoreq.n.times.10.1 kilocalories/mole of such hydrated halide compound wherein n is the number of water molecules bound to the metal halide in the metal halide hydrate. Also disclosed is an appertaining scavenger composition and a contacting apparatus wherein the scavenger is deployed in a bed for contacting with the water impurity-containing gaseous hydrogen halide.

Claims9

Dependent claims

A scavenger, having utility for drying a gaseous hydrogen halide of the formula HX, wherein X is selected from the group consisting of bromine, chlorine, fluorine, and iodine, to remove water impurity therefrom and produce an essentially completely water-free gaseous hydrogen halide effluent characterized by residual water concentration of below 0.1 part per million by volume (ppm), said scavenger comprising:

(a) a support;
and
(b) associated with said support an active scavenging moiety selected from one or more members of the group consisting of:
(i) metal halide compounds dispersed in the support, of the formula MX.sub.y ;
(ii) metal halide pendant functional groups, of the formula -MX.sub.y-1, covalently bonded to the support,
wherein:
M is a y-valent metal selected from the group consisting of lithium (I), beryllium (II), magnesium (II), calcium (II), strontium (II), barium (II), cadmium (II), nickel (I), iron (II), iron (III), zinc (II), and aluminum (III);
y is an integer whose value is from 1 to 3;
and
the active scavenging moiety metal halide compounds and/or metal halide pendant functional groups have been formed by reaction of corresponding partially or fully akylated compounds and/or pendant functional groups, with the gaseous hydrogen halide, to form the ative scavenging moiety metal halide compounds and/or metal halide pendant functional groups;
the vapor pressure of the support is less than 1 ppm;
M is selected such that the heat of formation of its hydrated halide, MX.sub.y. (H.sub.2 O).sub.n, is greater than or equal to 10.1 kilocalories per mole of such hydrated halide compound for each hydrated water molecule, wherein n is the number of water molecules bound to the metal halide in the metal halide hydrate;
with the proviso that the support is formed of a material which is both chemically and physically different from said active scavenging moiety.

10 more elements

Dependencies are inferred from the claim text.