Apparatus for heat-treating wafers

An apparatus for heat-treating wafers, comprising:

• a hollow cylindrical body;
• a furnace core tube disposed within said cylindrical body for accomodating wafers placed therein for heat-treatment;
• heating means provided within said cylindrical body for heating said furnace core tube, said heating means being positioned outwardly remote from an exterior peripheral surface of said furnace core tube in such a manner as to surround said tube;
• a plurality of insulating heat-resistant bar members provided within said cylindrical body and extending in a direction parallel to a central axis of said furnace core tube, said bar members supporting said heating means in a position inwardly remote from the interior peripheral surface of said cylindrical body;
• and
• a plurality of supporting members mounted on said bar members for cooperatively supporting said furnace core tube.

An apparatus for heat-treating wafers, comprising:

• a hollow cylindrical body having an infrared reflection film formed on an interior peripheral surface thereof;
• a furnace core tube disposed within said cylindrical body, for accommodating wafers;
• heating means provided within said cylindrical body for heating said furnace core tube, said heating means being positioned in a space defined by an interior peripheral surface of said cylindrical body and an exterior peripheral surface of said furnace core tube in such a manner as to surround said tube;
• a plurality of insulating heat-resistant bar members located in said space and extending in a direction parallel to an axis of said furnace core tube, said bar members supporting said heating means out of contact with said furnace core tube and said cylindrical body

An apparatus for heat-treating wafers, comprising:

• a hollow cylindrical body having an infrared reflection film formed on an exteiror peripheral surface thereof;
• a furnace core tube disposed within said cylindrical body, for accommodating wafers;
• heating means provided within said cylindrical body for heating said furnace core tube, said heating means being positioned in a space defined by the interior peripheral surface of said cylindrical body and an exterior peripheral surface of said furnace core tube in such a manner as to surround said tube;
• a plurality of insulating heat-resistant bar members located in said space and extending in a direction parallel to an axis of said furnace core tube, said bar members supporting said heating means out of contact with said furnace core tube and said cylindrical body.