Method for directly bonding ceramic and metal members and laminated body of the same
AssigneeTokyo Shibaura Denki Kabushiki Kaisha
InventorsNobuyuki Mizunoya, Hajime Kohama, Yasuyuki Sugiura
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Abstract
A laminated body comprising a ceramic member and a metal member, and a method of forming the laminated body are described. The laminated body is characterized in that the ceramic member contains in its surface portion a bonding agent and the metal member is directly bonded to the surface of the ceramic member. The method of forming the laminated body is characterized in that a bonding agent-containing layer is first formed in the surface of the ceramic member and then the bonding agent-containing layer is heated while being contacted with the metal member.
Claims3
A heat conductive substrate comprising an aluminum nitride ceramic plate having a surface oxidized at a thickness of 20 microns or less and a copper layer directly bonded to said oxidized surface, a eutectic crystal being formed between the copper layer and said oxidized surface.
Dependencies are inferred from the claim text.