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US 4,845,049 AGranted
Doping III-V compound semiconductor devices with group VI monolayers using ALE
AssigneeNEC Corporation
InventorHaruo Sunakawa
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Abstract
An n-type III-V compound semiconductor comprises a plurality of monolayers of III-V compound semiconductor molecules having a layer-by-layer structure of group III element and group V element laminated alternately, and a group VI element-doped monolayer. The group VI element-doped monolayer is inserted into the III-V compound semiconductor molecules by occupying lattice points which were occupied by the group V element. The layers of the semiconductor are grown by Atomic Layer Epitaxy process.
Claims3
Method of producing n-type III-V compound semiconductor comprising:
- a first step of growing a plurality of monolayers of III-V compound semiconductor molecules on a III-V compound substrate;
- a second step of growing a single layer of group VI element on said III-V monolayers so as to occupy lattice points for group V element by means of Atomic Layer Epitaxy process;
- and a third step of growing a plurality of monolayers of III-V compound semiconductor molecules on the group VI element-doped layer by means of said Atomic Layer Epitaxy process.
Growing method of Se-doped n-type GaAs crystal comprising;
- a first step of adsorbing a monolayer of GaCl molecule onto GaAs substrate by exposing thereof the GaCl gas,
- a second step of exposing said substrate to AsH.sub.3 gas to grow As monolayer onto Ga monolayer by desorbing Cl from said GaCl molecule as HCl gas,
- a third step of repeating said first step and second step consequently to grow a desired number of monolayers of GaAs molecule,
- a fourth step of adsorbing a monolayer of GaCl molecule onto said monolayers of GaAs molecule,
- a fifth step of exposing said substrate after said fourth step to H.sub.2 Se gas to grow Se monolayer onto Ga monolayer by desorbing Cl from said GaCl molecule as HCl gas,
- a sixth step of growing GaCl monolayer onto said Se monolayer exposing said substrate after said fifth step to GaCl gas;
- a seventh step of exposing said substrate after said sixth step to AsH.sub.3 gas to grow As monolayer onto Ga monolayer,
- a eighth step of exposing said substrate after said seventh step to GaCl gas to grow Ga monolayer onto As monolayer, and
- a ninth step of repeating said seventh step and eighth step alternatively after said eighth step to grow a desired number of monolayers of GaAs molecules.
6 more elements
Dependencies are inferred from the claim text.