Ceramic coatings from the pyrolysis in ammonia of mixtures of silicate esters and other metal oxide precursors
AssigneeDow Corning Corporation
InventorsLoren A. Haluska, Keith W. Michael, Leo Tarhay
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Abstract
Hydrolyzed or partially hydrolyzed mixtures of silicate esters and metal oxide precursors, are pyrolyzed at relatively low temperature in the presence of ammonia to form ceramic coatings on substrates such as electronic devices. The metal oxide precursors are soluble compounds, for example alkoxides, of aluminum, titanium, or zirconium. The coatings produced are useful for the protection of electronic devices. One or more coatings containing amorphous silicon, silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the nitrided ceramic SiO.sub.2 /metal oxide coating for still further protection of electronic devices.
Claims16
A process for forming on a substrate a ceramic coating which process comprises:
- (A) applying to the substrate a flowable solution of a composition comprising a hydrolyzed or partially hydrolyzed mixture of a silicate ester and a metal oxide precursor selected from the group consisting of acyloxy and alkoxy compounds of aluminum, titanium, and zirconium wherein the proportion by weight of metal oxide precursor as metal oxide is abouut 0.1 to about 30 percent;
- (B) drying the solution to deposit a preceramic coating on the substrate;
- and
- (C) heating the coated substrate in a substantially ammonia atmosphere to a temperature of 200.degree. to 100.degree. C. to produce a nitrided ceramic coating on the substrate.
Dependencies are inferred from the claim text.