Dual voice coil shutter

In a channeled light device, apparatus for controlling passage of light hitting the photoresistive wafer through said device comprising

• a core,
• a shutter type mechanism rotatably mounted about a common axis, said mechanism including a pair of blades having a scissors-like arrangement adapted to simultaneously open and close upon an optical path, said shutter mechanism including
• a pair of voice-type coil means, each of which is connected to a respective one of said pair of blades,
• means for applying a DC electrical current to said coils to effect a rotation of said pair of blades between opened and closed portions about a single axis of rotation within a predetermined period of time to minimize torque and where the rotation of said blades depends upon the direction of application of said electrical current.

Apparatus for use in a stepper system for controlling passage of light hitting a photoresistive wafer through a reticle comprising

• a core,
• a shutter type mechanism rotatably mounted about a common axis, said mechanism including a pair of blades having a scissors-like appeasement adapted to simultaneously open and close upon an optical path, said shutter mechanism including
• a pair of voice-type coil means each of which is connected to a respective one of said pair of blades,
• open loop control means for applying a DC electrical current to said coil means such that said coil means rotate in a common plane about said core to effect a rotation of said blades between opened and closed positions about a single axis of rotation within a predetermined period of time where the rotation of said blades depends upon the direction of application of said electrical current.