Method of producing sheets of crystalline material
AssigneeMassachusetts Institute of Technology
InventorsCarl O. Bozler, John C. C. Fan, Robert W. McClelland
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Abstract
A method of producing sheets of crystalline material is disclosed, as well as devices employing such sheets. In the method, a growth mask is formed upon a substrate and crystalline material is grown at areas of the substrate exposed through the mask and laterally over the surface of the mask to form a sheet of crystalline material. This sheet is optionally separated so that the substrate can be reused. The method has particular importance in forming sheets of crystalline semiconductor material for use in solid state devices.
Claims9
A method of producing a sheet of crystalline material over a substrate, comprising:
- a. forming a mask of the substrate to expose single crystal areas on or in the substrate;
- b. depositing crystallizable material over said substrate and mask;
- c. scanning with a localized heat source to provide sufficient energy to the crystallizable material to cause lateral epitaxial crystal growth thereof;
- and
- d. continuing lateral overgrowth until a sheet of crystalline material having desired dimensions has formed.
Dependencies are inferred from the claim text.