Method of encapsulating conductors
AssigneesAVX Corporation, IBM Corporation
InventorsJohn Galvagni, Robert A. Miller
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Abstract
A method of forming successive metal layers of varying widths on a substrate is disclosed. A mask having a through going aperture is provided, the mask including a constricted neck portion between its upper and lower surfaces. Successive metal layers are applied over the substrate through the aperture in the mask sequentially by sputtering methods which form a metallic layer wider than the constricted neck portion of the mask and by vapor deposition method which forms a narrower metal layer corresponding to the transverse dimension of the constricted portion of the mask.
Claims5
The method of providing superposed or encapsulated metallic conductive paths on a dielectric substrate or the like, which comprises the steps of providing a mask member having an upper and a lower surface and an aperture formed therethrough, said aperture including a wide base portion at said lower surface and a constricted neck portion of lesser transverse dimension than said base portion intervening between said upper and lower surfaces, positioning said mask against a substrate with said lower surface in engagement with said substrate, thereafter depositing a metal pattern through said mask by a vacuum deposition step to thereby form a first metallic pattern conforming essentially to the transverse dimension in plan of said neck portion of said aperture and thereafter depositing metal through said aperture of said mask by a sputtering procedure to thereby form a second metal pattern in covering relation of said first metal pattern, said second metal pattern extending transversely beyond said first metal pattern and corresponding essentially to the dimensions in plan of said base portion of said aperture, whereby said first metal pattern is encapsulated beneath said second metal pattern.
The method of forming on a substrate superposed metal areas of differing transverse dimension, which comprises the steps of providing a mask having an aperture formed therethrough, said aperture being characterized in that portion of said aperture at a lower surface of said mask are wider than other portions of said aperture, positioning said lower surface of said mask against a substrate, depositing a first metal layer over said substrate by a vapor deposition step through said mask to form a metallic pattern corresponding essentially to the dimensions in plan of said other portions of said aperture, and depositing a second metal layer over said substrate through said mask without removing said mask from said substrate by a sputtering step to form a metal pattern corresponding essentially with the dimensions in plan of said base portion, in covering relation of said first layer.
Dependencies are inferred from the claim text.