Electrically controllable valve etched from silicon substrates

An electrically controllable valve etched from silicon substrates for controlling fluid flow from a pressurized source, comprising:

• a first silicon substrate having an inlet orifice etched therethrough;
• a second silicon substrate having at least one outlet orifice etched therethrough, said second substrate also having an obverse surface coupled to said first substrate to define a channel communicating between said inlet orifice and said outlet orifice;
• a recess etched into said reverse surface of said second substrate to define a diaphragm between said recess and said channel;
• a mesa coupled to said diaphragm having an obverse surface in operative alignment with said inlet orifice and also having a reverse surface;
• a permanent magnet coupled to said reverse surface of said mesa;
• a third substrate bonded to said reverse surface of said second substrate for sealing said recess;
• a passage communicating between the pressurized source of fluid and said recess;
• an electrically conductive coil bonded to said third substrate in alignment with said permanent magnet;
• and
• means for applying a dc current to said coil in a direction to move said mesa against said inlet orifce and for applying a dc current to said coil in a direction to move said mesa away from said inlet orifice.

An electrically controllable fuel injector valve for controlling the fuel flow from a pressurized source, comprising:

• a fuel injector body coupled to the pressurized source of fuel;
• a first silicon substrate positioned in said fuel injector body having an obverse surface communicating with the pressurized source of fuel, a channel etched into a reverse surface of said first substrate, and an inlet orifice etched through said obverse surface of said first substrate and said channel;
• a second silicon substrate having at least one outlet orifice etched therethrough, said second substrate having an obverse surface bonded to said reverse surface of said second substrate such that said channel communicates between said inlet and outlet orifices;
• a recess etched into said reverse surface of said second substrate to define a diaphragm between said recess and said channel;
• a mesa coupled to said diaphragm having an obverse surface in operative alignment with said inlet orifice and also having a reverse surface;
• a permanent magnet coupled to said reverse surface of said mesa;
• third substrate bonded to said reverse surface of said second substrate for sealing said recess;
• a passage communicating between the pressurized source of fluid and said recess;
• an electrically conductive coil bonded to said third substrate in alignment with said permanent magnet;
• and
• means for applying a dc current to said coil in a direction to move said mesa against said inlet orifice and for applying a dc current to said coil in a direction to move said mesa away from said inlet orifice.