US 4,823,006 A · Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope

Abstract

This invention provides for an integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope (ESEM). The ESEM includes a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube. An annular ring comprised of magnetic materials abuts said magnetic housing at the lower end thereof and contains at least two pumping ports therein located axially with respect to one another. At least two annular nonmagnetic diaphragms and a final magnetic annular diaphragm are attached to the annular ring at different axial locations and extending inwardly therefrom. The diaphragms define at least two interior passages which each communicate with one of the pumping ports formed in the annular ring. A combination aperture holder and electron detector is releasably received and sealed with in the central openings of the annular diaphragms. The aperture holder has apertures therein for the passage of the electron beam and gas into and out of the specimen chamber of the ESEM and the interior passages and has electron detector means associated with the lower portion thereof.

Claims23

Dependent claims

An objective lens assembly for an environmental scanning electron microscope comprising:

(a) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube, said housing having upper and lower pumping ports therein axially distanced from one another;
(b) at least two annular diaphragms of nonmagnetic material and a final magnetic annular diaphragm attached to said housing at different axial locations and extending inwardly of said housing, said diaphragms defining at least two interior passages, each of which communicate with the said upper and lower pumping ports, respectively;
and
(c) aperture means located within the central opening of said diaphragms to permit passage of said electron beam from said vacuum liner tube into said interior passages and then into the specimen chamber of said environmental scanning electron microscope and to limit passage of gas molecules from the said specimen chamber into the said interior passages.

1 more element

An objective lens assembly for an environmental scanning electron microscope comprising:

(a) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing the beam of electrons passing through said liner tube;
(b) an upper annular ring comprised of magnetic material abutting said magnetic housing at one end thereof and a lower ring comprised of magnetic material abutting said first ring, each of said rings having a plurality of circumferentially disposed ports therein;
(i) an annular upper diaphragm comprised of nonmagnetic material attached and sealed to an upper portion of said upper ring and extending inwardly thereof, said upper diaphragm having a central bushing which receives said vacuum liner,
(ii) an annular intermediate diaphragm comprised of nonmagnetic material attached and sealed to a lower portion of said upper ring and extending inwardly thereof, and
(iii) an annular lower diaphragm comprised of magnetic material attached and sealed to said lower ring and extending inwardly thereof and comprising the final pole piece of said objective lens assembly,
said upper and intermediate diaphragms defining an upper interior passage which communicates at its periphery with the plurality of ports in said upper ring and said intermediate and lower diaphragms defining a lower interior passage which communicates at its periphery with the plurality of ports in said lower ring;
and
(c) (i) upper aperture means located within the central opening of said upper diaphragm sized to permit passage of an electron beam from said vacuum liner tube into said upper interior passage,
(ii) intermediate aperture means located within the central opening of said intermediate diaphragm sized to permit passage of said electron beam into said lower interior passage and to limit passage of gas from said lower interior passage to said upper interior passage, and
(iii) lower aperture means located within the central opening of said lower diaphragm sized to permit passage of said electron beam into the specimen chamber of said environmental scanning microscope and to limit the passage of gas from the said specimen chamber into said lower interior passage.

7 more elements

A combination objective lens assembly, aperture holder and detector for use in an environmental electron scanning microscope comprising:

(a) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing the beam of electrons passing through said liner tube;
(b) an upper annular ring comprised of magnetic material abutting said magnetic housing at one end thereof and a lower ring comprised of magnetic material abutting said first ring, each of said rings having a plurality of circumferentially disposed ports therein;
(i) an annular upper diaphragm comprised of nonmagnetic material attached and sealed to an upper portion of said upper ring and extending inwardly thereof, said upper diaphragm having a central bushing which receives said vacuum liner,
(ii) an annular intermediate diaphragm comprised of nonmagnetic material attached and sealed to a lower portion of said upper ring and extending inwardly thereof, and
(iii) an annular lower diaphragm comprised of a magnetic material attached and sealed to said lower ring and extending inwardly thereof and comprising the final pole piece of said objective lens assembly, said upper and intermediate diaphragms defining an upper interior passage which communicates at its periphery with the plurality of ports in said upper ring and said intermediate and lower diaphragms defining a lower interior passage which communicates at its periphery with the plurality of ports in said lower ring;
and
(c) a combination aperture holder and electron detector releasable sealed within the central openings of said annular lower and intermediate diaphragms and comprised of:
(i) a main body having a conduit therein, said main body being adapted to be releasably received and sealed within a recess in said objective lens assembly;
(ii) a lower aperture in the lower end of said conduit sized to permit an electron beam to pass through and to limit the passage of gas from the specimen chamber of the said environmental scanning electron microscope to the zone above said lower aperture;
(iii) a port in said main body above the said lower aperture, said port providing communication from said conduit into a lower interior passage in said objective lens assembly;
(iv) a higher aperture within said conduit positioned above said lower aperture and above the said port therein, said upper aperture being sized to permit an electron beam to pass therethrough and to limit the passage of gas from:
the conduit to an upper interior passage within said objective lens assembly;
and
(v) an electron detector located at the lower end of said main body and separated therefrom by insulating means.

11 more elements

An improved environmental scanning electron microscope comprising:

(a) means for generating and directing an electron beam toward a specimen;
(b) a combination objective lens assembly and aperture holder comprising:
(i) a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube;
(ii) an annular ring comprised of magnetic material abutting said magnetic housing at the lower end thereof and containing at least two ports therein located axially with respect to one another;
(iii) at least two annular diaphragms comprised of nonmagnetic material and a final magnetic diaphragm attached to said annular ring at different axial locations and extending inwardly of said ring, said diaphragms defining at least two interior passages, each of which communicates with one of the said ports in said annular ring;
and
(iv) a combination aperture holder and electron detector releasably sealed within the central openings of said magnetic diaphragm and one of said nonmagnetic diaphragms and comprised of:
a main body having a conduit therein, releasably received and sealed within a recess in said objective lens assembly;
a lower aperture in the lower end of said conduit sized to permit an electron beam to pass through and to limit the passage of gas from the specimen chamber of the said environmental scanning electron microscope to the zone above said lower aperture;
a port in said main body above the said lower aperture, said port providing communication from said conduit into a lower interior passage in said objective lens assembly;
a higher aperture within said conduit positioned above said lower aperture and above the said port therein, said upper aperture being sized to permit an electron beam to pass therethrough and to limit the passage of gas from the conduit to a higher passage within said objective lens assembly;
(c) a specimen chamber positioned below said objective lens, which maintains the specimen enveloped in gas in registration with the lower aperture such that a surface of the specimen may be exposed to the focused beam of electrons;
(d) a specimen mount located within the specimen chamber and positioned for supporting the specimen so as to allow the focused beam of electrons to interact with the specimen;
and
(e) electron detection means positioned to detect electrons resulting from said interaction.

12 more elements

Dependencies are inferred from the claim text.

Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope

Life of this patent

Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope

Life of this patent

Abstract

Claims23