Method for cleanup processing chamber and vacuum process module
AssigneeTexas Instruments Incorporated
InventorsCecil J. Davis, Robert T. Matthews, Rhett B. Jucha, Lee M. Loewenstein
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Abstract
A process module having remote plasma and in situ plasma generators, and a radiant heater, which represent three separate energy sources. The three sources can be used singly or in any combination and can be separately controllable.
Claims52
A vacuum process module capable of receiving a workpiece comprising:
- (a) a process chamber;
- (b) a remote plasma generator remote from and in fluid communication with said process chamber;
- (c) an in situ plasma generator within said process chamber;
- and
- (d) a radiant heater coupled to said process chamber.
A vacuum process module capable of receiving a workpiece comprising:
- (a) a plasma generator generating at least free radicals remote and in fluid communication with the workpiece;
- and
- (b) a heater coupled to said workpiece.
A vacuum process module capable of receiving a workpiece comprising:
- (a) an in-situ plasma generator coupled to said workpiece;
- and
- (b) a heater coupled to said workpiece.
A vacuum process module capable of receiving a workpiece comprising:
- (a) a plasma generator for generating free radicals remote from and in fluid communication with said workpiece;
- and
- (b) at least a first energy source coupled to said workpiece.
The module as set forth in clalm 23 wherein said plasma generator and said first energy source are separately controlled to operate singly.
A vacuum process module comprising:
- (a) a process chamber;
- (b) a plasma generator remote from and in fluid communication with said process chamber;
- and
- (c) at least a first energy source within said process chamber.
A vacuum process module capable of receiving a workpiece comprising:
- (a) a remote plasma generator in fluid communication with said workpiece;
- (b) an in situ plasma generator coupled to said workpiece;
- and
- (c) a heater coupled to said workpiece.
A method for cleanup of a processing chamber comprising the steps of:
- (a) introducing free radicals to the process chamber;
- and
- (b) removing undesired deposits from the processing chamber.
Dependencies are inferred from the claim text.