MOSFET with reduced short channel effect
AssigneeHitachi, Ltd.
InventorsYoshiaki Yazawa, Yutaka Kobayashi, Akira Fukami, Takahiro Nagano
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AssigneeHitachi, Ltd.
InventorsYoshiaki Yazawa, Yutaka Kobayashi, Akira Fukami, Takahiro Nagano
Estimating the term…
An MOSFET provided with a gate insulating film formed on a semiconductor surface between a source region and a drain region, a gate electrode formed on the gate insulating film, and a channel region sandwiched between the source region and the drain region and made up of a first layer and a second layer is disclosed in which the first layer lies beneath the gate insulating film and is opposite in conductivity type to the source and drain regions, the second layer lies beneath the first layer and has the same conductivity type as the source and drain regions, and the length of the second layer between the source region and the drain region is greater than the length of the first layer between the source region and the drain region.
A semiconductor switching device comprising:
A semiconductor switching device comprising:
A semiconductor switching device comprising:
Dependencies are inferred from the claim text.