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US 4,818,722 AGranted
Method for generating a strip waveguide
AssigneeSiemens Aktiengesellschaft
InventorJochen Heinen
Life of this patent
Estimating the term…
Abstract
A method for generating a strip laser in a buried hetero-structure composed of layers, wherein a raised strip is etched out of the layer structure and the strip is laterally etched with an erosion melt. The lateral edges of the laser active layer are protected by leaving them covered with a portion of the layer dissolved out by the erosion melt. The deposits thus remaining are used to initiate the generation of an epitaxial layer which extends laterally from the laser-active layer.
Claims8
A method for generating a strip waveguide which comprises:
- providing an epitaxial hetero-layer structure composed of a laser-active layer located between two semiconductor layers, the width of said laser-active layer being greater than the width of the final laser-active layer,
- forming a raised strip (1) from the epitaxial hetero-layer structure, said strip being laterally etched with an erosion melt and the lateral surface (21, 22) of the laser-active layer (2) of the htero structure functioning as a waveguide region of the strip (1) is etched away laterally more than the two semiconductor layers and is left covered by one of the erosion melt or a part (5) of said layer dissolved by said melt, and
- growing an epitaxial layer laterally outwardly from said erosion melt deposits.
Dependencies are inferred from the claim text.