Flat lapping machine
AssigneeSpeedfam Corporation
InventorsHatsuyuki Arai, Isao Nagahashi, Seiichi Maeda, Kazumi Yasuda, Shiro Furusawa, Kazuhiko Hirata, Kastunori Nagao, Kazuhiko Kondo, Takaya Sanoki, Misuo Sugiyama, Shinichi Kusano
Life of this patent
Estimating the term…