Back to results
US 4,804,490 AGranted
Method of fabricating stabilized threshold switching material
AssigneeEnergy Conversion Devices, Inc.
InventorsRoger W. Pryor, Patrick J. Klersy, Jerry A. Piontkowski, Napolean P. Formigoni
Life of this patent
Estimating the term…
Abstract
A method of stabilizing the switching characteristics of a thin film chalcogenide glass material by subjecting said material to a hydrogenated atmosphere, preferably activated hydrogen and argon. It is also preferred to provide a post hydrogenation anneal step.
Claims10
A method of stabilizing the threshold switching characteristics of a thin film chalcogenide glass material, said method comprising the steps of:
- (a) providing a thin film chalcogenide glass material possessing threshold switching characteristics;
- (b) subjecting said chalcogenide glass material to a hydrogenated atmosphere for stabilizing the threshold switching characteristics thereof;
- and
- (c) controlling the temperature, pressure and energy levels during which the hydrogenation occurs so as to provide first, second and third independent controls upon the rate at which said stabilization process proceeds.
1 more element
Dependencies are inferred from the claim text.