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US 4,804,086 AGranted
Transport container with an interchangeable inside container
AssigneeSiemens Aktiengesellschaft
InventorPeter Grohrock
Life of this patent
Estimating the term…
Abstract
A transport container with an interchangeable, bipartite inside container includes an outside hood, an outside bottom plate, an inside hood, an inside bottom plate, two closing levers, a sealing element and a semiconductor holder. A filter element is built into the container to provide a particle-type transportation container for transporting and storing semiconductor wafers in a semiconductor wafer cassette and for use in differing air pressure conditions and air purity conditions.
Claims11
A transport container for transporting and storing semiconductor wafers in a semiconductor wafer cassette, comprising:
- an outside hood;
- an outside bottom plate;
- an inside hood;
- an inside bottom plate that forms a closed inside container with said inside hood;
- first and second closing levers for non-positive closing of said outside hood with said outside bottom plate;
- a sealing element for air-tight closure of said transport container;
- and
- an interchangeable semiconductor wafer holder secured to said inside hood and hingedly moveable relative to said transporting container.
5 more elements
Dependencies are inferred from the claim text.