Method of synthesizing amorphous group IIIA-group VA compounds
AssigneeInternational Business Machines Corporation
InventorLawrence D. David
Life of this patent
Estimating the term…
Abstract
A method of synthesizing amorphous Group IIIA-Group VA compounds. A first solution is prepared which consists of a tris(trialkylsilyl) derivative of either a Group IIIA or Group VA element dissolved in an organic solvent. A second solution is then prepared which consists of a halide of the other of the Group IIIA or Group VA element dissolved in an organic solvent. Then the first and second solutions are mixed such that a Group IIIA-Group VA compound is formed along with a trialkylhalosilane by-product. The final step of the method consists of removing the trialkylhalosilane by-product and organic solvent mixture to form the Group IIIA-Group VA condensed phase.
Claims38
A method of synthesizing amorphous Group IIIA-Group VA compounds comprising the steps of:
- (a) mixing equimolar amounts of a tris(trialkylsilyl) compound of a Group IIIA element with a halide of a Group VA element in a non-protic, non-active hydrogen containing dried, deoxygenated organic solvent wherein the Group IIIA element is selected from the group consisting of aluminum, boron, gallium, indium, and mixtures thereof and the Group VA element is selected from the group consisting of antimony, arsenic, nitrogen, phosphorus, and mixtures thereof;
- (b) reacting the components of the mixture of step (a) to form an adduct of the general formula:
- ##STR3## wherein R=an alkyl group;
- A=aluminum, boron, gallium, indium, or mixtures thereof;
- B=antimony, arsenic, nitrogen,
- phosphorus, or mixtures thereof;
- and
- X=bromine, chlorine, fluorine, or iodine,
- thereinafter which is formed a Group IIIA-Group VA
- compound having the general formula AB and a halide
- by-product having the general formula R.sub.3 SiX;
- and
- (c) removing the R.sub.3 SiX by-product to recover the AB stoichiometric condensed phase, wherein said phase contains less than about 10% by volume crystallinity.
The method of claim wherein the Group IIIA element is boron, the Group VA halide is PBr.sub.3, PCl.sub.3, PF.sub.3, or PI.sub.3, and the condensed phase is boron phosphide.
A method of synthesizing amorphous Group IIIA-Group VA compounds comprising the steps of:
- (a) mixing equimolar amounts of a tris-trialkylsilyl) compound of a Group VA element with a halide of a Group IIIA element in a non-protic, non-active hydrogen containing dried, deoxygenated organic solvent wherein the Group VA element is selected from the group consisting of antimony, arsenic, nitrogen, phosphorus, and mixtures thereof and the Group IIIA element is selected from the group consisting of aluminum, boron, gallium, indium, and mixtures thereof;
- (b) reacting the components of the mixture of step (a) to form an adduct of the general formula:
- ##STR4## wherein R=alkyl group;
- B=antimony, arsenic, nitrogen, phosphorus or mixtures thereof;
- A=aluminum, boron, gallium, indium or mixtures thereof;
- and
- X=bromine, chloride, fluorine or iodine,
- thereinafter which is formed a Group IIIA-Group VA compound having the general formula AB and a halide by-product having the general formula R.sub.3 SiX;
- and
- (c) removing the R.sub.3 SiX by-product to recover the AB stoichiometric condensed phase, wherein said phase contains less than about 10% by volume crystallinity.
A method of synthesizing amorphous Group IIIA-Group VA compounds comprising the steps of:
- (a) dissolving a tris(trialkylsilyl) compound of a Group IIIA element in a non-protic, non-active hydrogen containing, dried, deoxygenated organic solvent to produce a first solution, wherein the Group IIIA element is selected from the group consisting of aluminum, boron, gallium, indium, and mixtures thereof;
- (b) dissolving a halide of a Group VA element in an inert, dried, deoxygenated organic solvent to produce a seconds solution, wherein the Group VA element is selected from the group consisting of antimony, arsenic, nitrogen, phosphorus, and mixtures thereof;
- (c) mixing said first solution with said second solution wherein a reaction occurs such that a Group IIIA-Group VA compound and a trialkylhalosilane by-product are produced in the organic solvent mixture;
- and
- (d) removing the trialkylhalosilane by-product and organic solvent mixture to recover the Group IIIA-Group VA condensed phase, wherein said phase contains less than about 10% by volume crystallinity.
A method of synthesizing amorphous Group IIIA-Group VA compounds commprising the steps of:
- (a) dissolving a tris-(trialkylsilyl) compound of a Group VA element in a non-protic, non-active hydrogen containing dried, deoxygenated organic solvent to produce a first solution, wherein the Group VA element is selected from the group consisting of antimony, arsenic, nitrogen, phosphorus, and mixtures thereof;
- (b) dissolving a halide of a Group IIIA element in an inert, dried, deoxygenated organic solvent to produce a second solution, wherein the Group IIIA element is selected from the group consisting of aluminum, boron, gallium, indium, and mixtures thereof;
- (c) mixing said first solution with said second solution wherein a reaction occurs such that a Group IIIA-Group VA compound and a trialkylhalosilane by-product are produced in the organic solvent mixture;
- and
- (d) removing the trialkylhalosilane by-product and organic solvent mixture to recover the Group IIIA-Group VA condensed phase, wherein said phase contains less than about 10% by volume crystallinity.
Dependencies are inferred from the claim text.