Vibration isolation means
AssigneeRank Taylor Hobson Limited
InventorAnthony B. Barnaby
Life of this patent
Estimating the term…
Abstract
In a metrological or other sensitive apparatus, the transducer or other operative member (22) is mounted on a support structure (14 to 18) which is carried on a chassis (2) by a first set of dampers or isolating means (10) and the chassis (2) is mounted on the floor by a second set of dampers or isolating means (6). The two sets (10, 6) have different natural frequencies and the first set (10) is arranged so that any vibration of the support structure tends to be rotational centered in the zone of operation (21) of the transducer or other member. This is achieved by arranging that the stiffness of the first set of dampers (10) is higher in the direction (24) passing through the zone of operation (21) than in the transverse direction.
Claims24
Apparatus for carrying out an operation on an object, comprising:
- a base for supporting the object;
- a device connected to said base for performing said operation in a defined zone of operation;
- a plurlaity of base isolating mounts each having a higher stiffness in a first direction than in a second direction transverse to said first direction, said base isolating mounts being connected to said base so that said first directions of said base isolating mounts converge in said zone of operation;
- and
- means for supporting said base isolating mounts on a floor so that said base is supported through said base isolating mounts.
Apparatus for sensing the surface of an object comprising:
- a base for supporting an object whose surface is to be sensed;
- a surface sensor connected to said base;
- means for effecting relative movement between the object and the sensor so that said sensor is effective in a zone of operation thereof for traversing and sensing the surface of the object;
- a plurality of base isolating mounts each having a higher stiffness in a first direction than in a second direction transverse to said first direction, said base isolating mounts being connected to said base so that said first directions of said base isolating mounts converge in said zone of operation;
- and
- means for supporting said base isolating mounts on a floor so that said base is supported through said base isolating mounts.
Metrological apparatus for measuring a characteristic of a workpiece, the apparatus comprising a base, a sensor susceptible to external vibrations mounted to said base, a frame, base isolating means for supporting said base on said frame, and frame isolating means for supporting said frame on a floor, said base isolating means and said frame isolating means each having an in situ natural frequency of vibration, said natural frequency of said base isolating means differing from said natural frequency of said frame isolating means.
Dependencies are inferred from the claim text.