Porous static pressure guide
AssigneeNippon Telegraph and Telephone Corporation
InventorsMunenori Kanai, Sunao Ishihara, Hiroo Kinoshita
Life of this patent
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Abstract
A static pressure lead screw includes a porous ceramic body having fluid flow paths as part of a flank. The porous ceramic body is fixed by a tubular base member through which the fluid does not flow. Fluid guide holes for supplying the fluid to the porous body extend through the tubular base member and are connected to the porous body. In a preferred embodiment, an electroless-plated layer is formed in a surface layer of the flank or an inner portion continuous with the surface layer, thereby obtaining various high-accuracy static pressure guides with high statical stiffness.
Claims32
A porous static pressure guide comprising a porous body of a ceramic material formed on a solid base member, wherein a guide hole is formed to extend through said solid base member and guided inside said porous body to supply a fluid to an interior of said porous body, thereby separating said porous body from an opposite object.
A static pressure guide including a rotatable or linearly movable first member and a second member spaced apart from a surface of said first member by a predetermined gap, said first and second members being separated from each other through a fluid filled therebetween, wherein said first member includes a solid base member and a porous body of a ceramic material formed on said solid base member to define at least the predetermined gap, and a guide hole is formed in said porous body to extend through said base member and guided inside said porous body to supply the fluid to an interior of said porous body, thereby separating said porous body from an opposite object.
A static pressure lead screw comprising a solid base member and a porous body of a ceramic material constituting at least part of a flank, wherein a guide hole is formed in said porous body to extend through said base member and guided inside said porous body to supply a fluid to an interior of said porous body, thereby separating said porous body from an opposite object.
A method of manufacturing a static pressure guide including a rotatable or linearly movable first member and a second member spaced apart from a surface of said first member by a predetermined gap and adapted to guide said first and second members through a fluid filled in the predetermined gap between said first and second members, including the step of forming a porous body of a ceramic material on a solid base member constituting said first member so as to define at least the predetermined gap, wherein a guide hole is formed to extend through said solid base member and guided inside said porous body to supply the fluid to an interior of said porous body, thereby separating said porous body from an opposite object.
A method of manufacturing a static pressure screw, comprising:
- forming a porous body of a ceramic material on a solid base member;
- forming crests and roots such that at least part of a flank is constituted by said porous body;
- and
- forming a guide hole extending from an outside of said solid base member to an interior of said porous body, thereby separating said porous body from an opposite body through a fluid supplied to said porous body.
A feed mechanism comprising:
- a screw rod rotatably supported above a base plate;
- a static pressure nut meshed with said screw rod to constitute a static pressure lead screw;
- a guide member disposed above said base plate and parallel to said screw rod;
- and
- a static pressure guide engaged with said guide member, wherein said static pressure nut comprises a first solid base member (302) and a porous body of a ceramic material formed on said first solid base member and constituting at least part of a flank, and a guide hole is formed in said porous body to extend through said base member and guided inside said porous body to supply a fluid to an interior of said porous body, thereby separating said porous body from said screw rod through the fluid, and
- said static pressure guide comprises a porous body of a ceramic material formed on a second solid base member (328) and a guide hole is formed in said porous body to extend through said second solid base member and guided inside said porous body to supply the fluid to an interior of said porous body from said guide member through the fluid.
Dependencies are inferred from the claim text.