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US 4,792,779 AGranted
Trimming passive components buried in multilayer structures
AssigneeHughes Aircraft Company
InventorsRamona G. Pond, William A. Vitriol, Raymond L. Brown
Life of this patent
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AssigneeHughes Aircraft Company
InventorsRamona G. Pond, William A. Vitriol, Raymond L. Brown
Estimating the term…
A technique is disclosed for trimming resistors and other passive circuit components buried in hybrid multilayer circuit structures. For example, resistors (13) are formed between two dielectric layers (11, 19) of a hybrid multilayer circuit structure (10). The multilayer circuit structure with the buried resistors is appropriately processed to provide a fired multilayer circuit structure. Trimming of the buried resistors is accomplished with a laser beam that cuts through dielectric material of the fired circuit structure to selectively remove part of the resistive material of the buried resistors. The values of the buried resistors may be tested with conductive elements (15, 17) that are conductively coupled to the buried resistors. The disclosed technique also contemplates the trimming of other buried passive circuit components such as capacitors, and further contemplates the use of other trimming methods such as abrasive, air jet, or water jet trimming.
A process for trimming a passive circuit component formed within a hybrid multilayer circuit structure, comprising the steps of:
A process of making a hybrid multilayer circuit structure haing a buried passive circuit component disposed therein, said method comprising the steps of:
A process of making a hybrid multilayer circuit structure having a buried passive circuit component disposed therein, said method comprising the steps of:
a process of making a hybrid multilayer circuit structure having a buried passive circuit component disposed therein, said method comprising the steps of:
Dependencies are inferred from the claim text.