Panel system for a clean room
OwnerConstantin Koutzaroffinventor
Life of this patent
Estimating the term…
Abstract
A panel for a raised floor of a clean room, such as for a semiconductor manufacturing facility, comprises tubes (2) whose open ends (3) are slipped over respective spacers (4) of spacer bars (5), providing cross-connection and support for said tubes (2). No welding or adhesives are needed. The size of the panel can be conveniently changed or adapted in the plant or in the field.
Claims20
A panel for a raised floor of a clean room comprising a pair of spaced apart, elongated spacer bars each having a row of spacers facing the other spacer bar, open ended tubes each having one end slipped over a spacer of one spacer bar and the other end slipped over a corresponding spacer of the other spacer bar, wherein the tubes are spaced from each other to allow airflow through the panel, each spacer bar further having an interlock at its longitudinal ends for interlocking with interlocks of other such panels when the panels are assembled into a raised floor comprising a plurality of adjacent panels where the bars of one panel are perpendicular to those of adjacent panels, and each spacer bar further having a flange beneath the spacers for supporting an airflow regulating register.
A panel for raised floor, mainly for clean rooms, characterized by the fact that the panel is formed of tubes (2) open at their ends (3) and supported at said open ends (3) by spacer bars (5).
A pluarlity of panels arranged into a raised floor of a clean room, wherein each panel comprises a pair of spaced apart, elongated spacer bars each having a row of spacers facing the other spacer bar, open ended tubes each having one end slipped over a spacer of one spacer bar and the other end slipped over a corresponding spacer of the other spacer bar, wherein the tubes are spaced from each other to allow airflow through the panel, each spacer bar further having an interlock at its longitudinal ends and wherein the panels assembled into said raised floor interlock with each other when the tubes of one panel are perpendicular to those of adjacent panels.
Dependencies are inferred from the claim text.