Method of manufacturing a thin-film magnetic head

A method of manufacturing a thin-film magnetic head for recording information in a magnetic recording medium comprising the steps of:

• (a) forming a first magnetic layer over a non-magnetic substrate,
• (b) forming a non-magnetic gap layer upon said first magnetic layer,
• (c) forming an insulation layer upon said gap layer,
• (d) forming a conductor coil upon said insulation layer,
• (e) forming again an insulation layer so as to cover said conductor coil,
• (f) forming a second magnetic layer upon said gap layer and said insulation layer, a magnetic gap being formed between said first and second magnetic layers at a tip portion facing a recording medium, and said second magnetic layer being connected to said first magnetic layer at an end portion opposite to said tip portion,
• (g) forming a metal oxide layer upon said second magnetic layer,
• (h) forming a mask by etching said metal oxide layer by reactive ion milling using freon gas,
• (i) forming said second magnetic layer, said gap layer, and said first magnetic layer into a predetermined shape respectively at said tip portion by dry etching to form a superposed body, wherein at least said gap layer and said first magnetic layer are formed into said predetermined shape by dry etching after forming a photoresist layer over said second magnetic layer except at said tip portion, and
• (j) forming a passivation layer upon said superposed body.

A method of manufacturing a thin-film magnetic head for recording information in a magnetic recording medium comprising the steps of:

• (a) forming an under layer upon a substrate,
• (b) forming a first magnetic layer upon said under layer,
• (c) forming a non-magnetic gap layer upon said first magnetic layer,
• (d) forming a conductor coil covered with an insulation layer over said gap layer,
• (e) forming a second magnetic layer upon said gap layer and said insulation layer, a magnetic gap being formed between said first and second magnetic layers at a tip portion facing a recording medium, and said second magnetic layer being connected to said first magnetic layer at an end portion opposite to said tip portion,
• (f) forming a mask made of metal oxide upon said second magnetic layer,
• (g) forming said second magnetic layer, said gap layer, and said first magnetic layer into a predetermined shape respectively at said tip portion by dry etching to form a superposed body, wherein at least said gap layer and said first magnetic layer are formed into said predetermined shape by dry etching after forming a photoresist layer over said second magnetic layer except at said tip portion, and
• (h) forming a passivation layer upon said superposed body.

A process of manufacturing a thin-film magnetic head for recording information in a magnetic recording medium comprising the steps of:

• (a) forming an under layer upon a non-magnetic substrate,
• (b) forming a first magnetic layer upon said under layer,
• (c) forming a non-magnetic gap layer upon said first magnetic layer,
• (d) forming an intermediate insulation layer made of organic resin upon said gap layer,
• (e) forming a conductor coil upon said intermediate insulation layer,
• (f) forming again an intermediate insulation layer made of organic resin so as to cover said conductor coil,
• (g) removing said intermediate layer so as to expose said gap layer at a tip portion facing a recording medium,
• (h) removing parts of said intermediate insulation layer and gap layer so as to expose said first magnetic layer at a portion of an end portion opposite to said tip portion,
• (i) superposing a second magnetic layer such that a magnetic gap is formed between said first and second magnetic layers at said tip portion and that said second magnetic layer is connected to said first magnetic layer at said end portion,
• (j) forming a metal oxide layer upon said second magnetic layer,
• (k) patterning said metal oxide layer by a reactive ion milling using 100% CF.sub.4 gas,
• (l) patterning said first magnetic layer by a dry etching using said patterned metal oxide layer as a mask to form a superposed body,
• (n) masking, using a photoresist, a portion of said superposed body excluding said tip portion,
• (o) removing said photoresist, and
• (p) forming a passivation layer upon said superposed body.