Device for the input of a nominal value for the impact point of an electron beam on a medium
AssigneeLeybold Aktiengesellschaft
InventorsVolker Bauer, Josef Heimerl, Horst Ranke
Life of this patent
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Abstract
The nominal position value for the impact point of an electron beam on a medium located in a crucible is input to a device having a screen on which the contours of the crucible are represented. Light pen means establish a plurality of nominal positions of impact of the electron beam within the represented contours of the crucible.
Claims15
Device for input of a nominal position value for the impact point of an electron beam on a medium located in a crucible, said device comprising a screen on which the contours of the crucible are represented and light pen means for establishing a plurality of nominal positions of impact of the electron beam within the represented contours of the crucible.
Dependencies are inferred from the claim text.