Electron beam scanning method and scanning electron microscope

A scanning electron microscope comprising means for generating a magnetic field for deflecting an electron beam, said means receiving a scanning signal which operates on said electron beam to scan an electrical insulation sample in one direction and another direction opposite to said direction alternately in a reciprocative fashion, with a time difference of n period(s) (where n=0, 1, 2, . . . plus a half period of an external a.c. magnetic field being provided between a scanning start time point in each scanning direction of said deflection magnetic field and a corresponding zero-cross time point of said external a.c. magnetic field.

An electron beam scanning method comprising the steps of generating a magnetic field for deflecting an electron beam, and scanning a sample having electrical characteristics approximating those of an insulator with said electron beam in one direction and another direction opposite to said direction alternately in a reciprocative fashion in response to a scanning signal, with a time difference of n period(s) (where n=0, 1, 2, . . . ) plus a half period of a.c. power being provided between a scanning start time point in each scanning direction of said deflection magnetic field and a corresponding zero-cross time point of said a.c. power.

An electron beam scanning method comprising the steps of generating a magnetic field for deflecting an electron beam, and scanning a sample having electrical characteristics approximating those of an insulator with said electron beam in one direction and another direction opposite to said direction alternately in a reciprocative fashion in response to a scanning signal, with a time difference of n period(s) (where n=0, 1, 2, . . . ) plus a half period of an external a.c. magnetic field being provided between a scanning start time point in each scanning direction of said deflection magnetic field and a corresponding zero-cross time point of said external a.c. magnetic field.