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US 4,791,288 AGranted
Scanning photon microscope for simulataneously displaying both the ampitude and phase distributions of ac photovoltage or photocurrents
AssigneeHitachi, Ltd.
InventorsKanji Kinameri, Chusuke Munakata
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Abstract
The scanning photon microscope according to this invention relates the phase of the ac photovoltage or photocurrent signal to the hue of a color image and the amplitude of the signal to the brightness of the image in representing the signal distribution in the specimen in the form of a color image, in order to make a clear distinction between the amplitude and phase of the ac photovoltage or photocurrent induced in the specimen when irradiated with a photon beam, thus permitting detailed and multilateral analysis of the specimen's characteristics.
Claims2
A scanning photon microscope comprising:
- a photon beam generator means that generates a photon beam;
- an ac signal generator means that generates an ac signal with a specified frequency;
- an optical modulator means that modulates the intensity of the photon beam according to the output signal from the ac signal generator means;
- a photon beam converging means that converges the photon beam modulated by the optical modulator means on the surface of the specimen;
- a photon beam scanning means that sweeps the photon beam converged by the photon beam converging means across the specimen surface;
- a photoelectric effect detector means that detects one of an ac photovoltage and photocurrent generated in the specimen when irradiated with the photon beam;
- an amplifier means that amplifies the one of the ac photovoltage and photocurrent detected by the photoelectric effect detector means;
- a reference signal generator that produces a reference signal with a specified phase difference from the output signal of the ac signal generator means;
- a phase shifter that produces a signal 90.degree. out of phase with the reference signal;
- two synchronizing rectifiers that perform synchronizing rectification on the output signal of the amplifier means according to the reference signal and to the output signal of the phase shifter;
- two integrators that integrate the outputs of the two synchronizing rectifiers;
- a signal converter that combines and converts the two integrator output signals into three kinds of signals;
- and a color image displaying means that, according to the three kinds of signals from the signal converter, illuminates red, green and blue primaries and thereby displays a color image in synchronism with the photon beam scanning;
- whereby the signal converter processes the outputs of the two integrators in such a way that the hue and brightness of the image on the color image display means correspond, respectively, to the phase difference of the one of the ac photovoltage and photocurrent signal from the reference signal, and to the amplitude of the signal.
11 more elements
Dependencies are inferred from the claim text.