Vaporizer system for ion source
AssigneeVarian Associates, Inc.
InventorsShu Satoh, Louis E. Evans, Jr.
Life of this patent
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Abstract
A vaporizer system for an ion source includes a radiation source positioned on the vaporizer axis for providing radiation, multiple crucibles radially spaced from the axis and circumferentially spaced from each other and a reflector rotatable about the axis for directing radiation from the source at a selected one of the crucibles. The radiation causes heating of the selected crucible and vaporization of a solid source material contained therein. The radiation source is a visible and/or infrared emitting lamp such as a quartz halogen lamp. The crucibles are thermally isolated from each other by a heat shield so that the selected crucible is heated while the others remain relatively cool.
Claims19
A vaporizer comprising:
- at least two crucibles each having a cavity for containing a solid source material to be vaporized and having an outlet for vapor generated in said cavity;
- radiation source means for providing radiation for heating a selected crucible and vaporizing a source material in said cavity of said selected crucible;
- and
- movable reflector means having a first position for reflecting radiation from said radiation source means toward a first selected one of said crucibles vaporization of the source material contained and a second position for reflecting radiation from said radiation source means toward a second selected one of said crucibles.
A vaporizer system comprising:
- radiation source means positioned on an axis for providing radiation;
- at least two crucibles radially spaced from said axis and circumferentially spaced from each other, said crucibles each having a cavity for containing a solid source material;
- reflector means rotatable about said axis from a first position for reflecting radiation from said radiation source means toward a first selected one of said at least two crucibles for causing vaporization of a source material contained in said cavity of said first selected crucible to a second position for reflecting radiation from said source means toward a second selected crucible of said at least two crucibles for causing vaporization of a source material contained in said cavity of said second selected crucible.
A vaporizer comprising:
- a crucible having a cavity for containing a solid source material to be vaporized and having an outlet for vapor generated in said cavity;
- radiation source means for providing radiation for heating the crucible and for vaporizing a source material to be placed in said cavity;
- and
- reflector means for reflecting radiation from said radiation source means toward said crucible to cause vaporization of a source material to be contained in said cavity,
- said crucible comprising a container having a side wall wherein a portion of the side wall closest to said radiation source means is thicker than a portion of the side wall remote from said radiation source means in order to promote uniform delivery of heat to a source material in said cavity.
Dependencies are inferred from the claim text.