High accuracy variable thickness laydown method for electronic components
AssigneeAVX Corporation
InventorsJohn L. Galvagni, Philip A. Troup
Life of this patent
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Abstract
A method for forming conductive paths of varying thickness on miniature electronic components such as I.C. and capacitors is disclosed. In accordance with the method there is provided a planar mask, the undersurface of which includes recessed areas of varying thickness and may include throughgoing paths. Apertures are formed through the mask in registry with the recessed areas and conductive path forming material is forced through the apertures and throughgoing paths to fill the recessed areas and paths. The mask is removed to form increments of conductive material of differing thickness corresponding to the thickness of the recessed areas and paths.
Claims5
The method of forming on a substrate conductive paths of varying thickness comprising the steps of providing a planar mask having flat upper and lower surfaces, said lower surface of said mask including a path having at least one recessed portion extending toward but terminating short of said upper surface, at least one throughgoing aperture formed in said mask in registry with said recessed portion of said path, said mask including at least one additional path extending through the entire thickness of said mask placing said undersurface of said mask against said substrate, thereafter forcing a viscous conductor forming mass downwardly from said upper surface to said lower surface through said aperture and path to substantially fill said paths, thereafter removing said mask to form increments of said mass corresponding to the thickness of said paths and causing said increments of said mass remaining on said substrate to be converted to conductive material.
The method of depositing on a substrate a conductive area comprising the steps of providing a planar mask of finite thickness, said mask including planar upper and lower surfaces, a continuous recessed path portion opening to said lower surface and extending partway toward said upper surface, said mask including aperture means extending from said upper surface and communicating with said path portion, placing said lower surface into engagement with a said substrate, thereafter forcing a viscous conductive forming mass through said aperture means to substantially fill said path portion and form on said substrate an increment of said mass corresponding to the thickness of said path portion and thereafter removing said mask and causing the increment of said mass remaining on said substrate to be converted into conductive material.
Dependencies are inferred from the claim text.