Integrated metrology for microlithographic objective reducing lens
AssigneeGCA Corporation/Tropel Division
InventorsJohn H. Bruning, Graham J. Siddell
Life of this patent
Estimating the term…
Abstract
Metrology for a microlithographic objective reducing lens 10 is integrated into a metrology block 20 secured to a lower region of the barrel 15 for lens 10. Block 20 has a central opening 27 around a lowermost element 11 of lens 10; and block 20 mounts distance detectors 28 around central opening 27, a pair of microscope objectives 30 and 31, and a pair of X and Y mirrors 40 and 41.
Claims36
Metrology apparatus integrated with a microlithographic objective reducing lens, said metrology apparatus comprising:
- a. a block secured under a lower region of a barrel for said lens, said block having a central opening within said lens barrel, said central opening extending around a lowermost element of said lens, and said block extending between said central opening and said lens barrel;
- b. a pair of microscope objectives mounted on said block between said central opening and said lens barrel;
- and
- c. a pair of X and Y interferometer mirrors mounted on said block under said lens barrel.
A metrology block for a microlithographic objective reducing lens, said metrology block comprising:
- a. said block being formed of a dimensionally stable material and being secured to a barrel for said lens under a lower region of said barrel;
- b. said block having a central opening within said lens barrel, said central opening extending around a lowermost element for said lens;
- c. metrology components for said lens being mounted on said block;
- and
- d. said metrology components including a pair of X and Y interferometer mirrors arranged under said lens barrel within an outside diameter of said lens barrel.
A metrology system coupled to a microlithographic objective reducing lens, said metrology system comprising:
- a. a block of dimensionally stable material mounted underneath a bottom of a barrel for said lens to extend around a lowermost element of said lens;
- b. said block having a central opening inside of said lens barrel and said lowermost lens element being disposed within said central opening;
- c. a pair of microscope objectives mounted on said block within an inside diameter of said barrel for said lens and outside of said central opening of said block;
- and
- d. a pair of mounts for respectively mounting each of said microscope objectives on said block, said mounts permitting said microscope objectives to be adjusted rotationally and vertically relative to said block.
Metrology apparatus integrated with a microlithographic objective reducing lens, said metrology apparatus comprising:
- a. a block of dimensionally stable material connected under a lower region of a barrel for said lens, said block having a central opening around a lowermost element of said lens, and said block extending within said lens barrel between said lens barrel and said central opening;
- and
- b. metrology components mounted on said block, said metrology components including a microscope objective arranged outside said central opening and within an inside diameter of said lens barrel.
Dependencies are inferred from the claim text.