High frequency discharge apparatus with impedance matching
AssigneePotomac Photonics, Inc.
InventorC. Paul Christensen
Life of this patent
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Abstract
In a high-frequency discharge apparatus utilizing a discharge tube positioned between an electrode and a ground plane, the electrode is shaped so as to increase the uniformity of the electric field across the discharge tube. Furthermore, a transmission line is formed between a conductor connected to the electrode and the ground plane, and impedance matching in the transmission line is provided by metal and/or dielectric tuning slugs inserted between the conductor and the ground plane.
Claims14
A microwave discharge apparatus, comprising:
- a ground plane,
- a discharge electrode having a longitudinal axis substantially parallel to the ground plane,
- a dielectric discharge tube positioned between said electrode and said ground plane,
- a conductive strip electrically contacting said electrode and positioned parallel to said ground plane, thus forming a transmission line conductor, and
- two dielectric slugs of approximately one quarter wave electrical length each, positioned between said transmission line conductor and said ground plane.
A microwave discharge apparatus, comprising:
- a ground plane,
- a discharge electrode having a longitudinal axis substantially parallel to the ground plane,
- a dielectric discharge tube positioned between said electrode and said ground plane,
- a conductive strip electrically contacting said electrode and positioned parallel to said ground plane, thus forming a transmission line conductor, and
- two dielectric slugs of approximately one quarter wave electrical length each, positioned between said transmission line conductor and said ground plane,
- wherein microwave power is capacitatively coupled from said transmission line conductor to said discharge electrode without direct electrical contact between said electrode and said conductor.
A microwave discharge apparatus, comprising:
- a ground plane,
- a discharge electrode having a longitudinal axis substantially parallel to the ground plane,
- a dielectric discharge tube positioned between said electrode and said ground plane,
- a conductive strip electrically contacting said electrode and positioned parallel to said ground plane, thus forming a transmission line conductor, and
- two dielectric slugs of approximately one quarter wave electrical length each, positioned between siad transmission line conductor and said ground plane,
- wherein a microwave electric field is produced between the electrode and the ground plane, and said discharge electrode has an edge, the shape of which is determined so as to increase uniformity of the microwave electric field produced between said discharge electrode and said ground plane.
A microwave discharge apparatus, comprising:
- a ground plane,
- a discharge electrode having a longitudinal axis substantially parallel to the ground plane,
- a dielectric discharge tube positioned between said electrode and said ground plane,
- a conductive strip electrically contacting said electrode and positioned parallel to said ground plane, thus forming a transmission line conductor, and
- two dielectric slugs of approximately one quarter wave electrical length each, positioned between said transmission line conductor and said ground plane,
- wherein a microwave electric field is produced between the electrode and the ground plane, and said discharge electrode has an edge, the shape of which is determined so as to increase uniformity of the microwave electric field produced between said discharge electrode and said ground plane, and
- wherein microwave power is capacitatively coupled from said transmission line conductor to said discharge electrode without direct electrical contact between said electrode and said conductor.
Dependencies are inferred from the claim text.