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US 4,789,780 AGranted
Apparatus for energy-selective visualization
AssigneeU.S. Philips Corporation
InventorsJan B. Le Poole, Karel D. Van der Mast
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Abstract
An apparatus for energy-selective visualization of a beam of charged particles emerging from an object is equipped with a double-focusing energy analyzer which is provided with a two-dimensional entrance diaphragm. For visualization of both an image and a spectrum, an optical imaging system behind the analyzer is preferably equipped with one or more quadrapole lenses. An illumination system for an object to be examined is preferably equipped with a system for a sequential partial illumination of the object.
Claims13
An apparatus for forming energy-selective viewing of images of objects comprising
- first means for forming with a beam of charged particles an image of an object,
- image field enlarging means for dividing said image into partial images in two directions, said image field enlarging means including second means for deflecting said beam in two dimensions,
- energy analyzing means for analyzing energy or velocity spectrums of said partial images, said energy analyzing means including entrance diaphragm means for selecting said partial images to be viewed in said two directions, and third means for projecting geometrically correct images from said energy analyzing means,
- fourth means following said energy analyzing means for again deflecting said partial images into said two directions, and
- detection means for detecting and monitoring signals provided from said partial images.
2 more elements
Dependencies are inferred from the claim text.