Method for the indirect identification of the intensity distribution of particle beam pulses generated in a particle beam measuring instrument
AssigneeSiemens Aktiengesellschaft
InventorErich Plies
Life of this patent
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Abstract
For indirect identification of an intensity distribution of particle beam pulses generated in a particle beam measuring instrument by use of a beam blanking system, a signal s(t) known in terms of its time-dependency is periodically fed into a specimen and stroboscopically sampled according to the sampling principle. The desired intensity distribution of the particle beam pulses is subsequently calculated by de-convolution of the measured signal h(t) recorded by the measuring chain.
Claims3
A method for identifying a time dependent intensity distribution g(t) of particle beam pulses generated in a particle measuring instrument employing a beam blanking system, comprising steps of:
- periodically applying a known signal s(t) known in terms of its time-dependency to a measuring point of a specimen;
- positioning a particle beam to the measuring point and creating the particle beam pulses by gating of the particle beam in synchronization with the known signal s(t);
- documenting secondary particles triggered at the measuring point by said particle beam pulses in a detector system which outputs secondary particle signals;
- stroboscopically sampling the known signal s(t) by shifting gating time points of the gated particle beam;
- deriving a measured signal h(t) from the secondary particle signal produced by the detector system;
- and
- identifying the time-dependent intensity distribution g(t) of the particle beam pulses by de-convolution of said measured signal h(t).
A method for identifying a time-dependent signal curve f(t) applied to a measuring point of the specimen, comprising steps of:
- positioning a pulsed particle beam to a measuring point having a known time-dependent intensity distribution g(t);
- documenting secondary particles triggered at the measuring point by said particle beam pulses in a detector system which outputs a secondary particle signal;
- stroboscopically sampling the signal f(t) by shifting gating time points of the gated particle beam;
- deriving a measured signal h(t) from the secondary particle signal produced by the detector system;
- and
- identifying the signal curve f(t) by de-convolution of the measured signal h(t) through use of the known intensity distribution g(t).
Dependencies are inferred from the claim text.