Method for controlling the crystal morphology of silicon nitride
AssigneeGTE Products Corporation
InventorsRobert A. Long, Harrison Shallenberger, Dale E. Wittmer
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AssigneeGTE Products Corporation
InventorsRobert A. Long, Harrison Shallenberger, Dale E. Wittmer
Estimating the term…
A method is disclosed for producing silicon nitride wherein the crystal morphology is controlled. The method involves heating a mixture consisting essentially of a chlorosilane and ammonia at a sufficient temperature for a sufficient time to produce a nitogen containing silane as an intermediate. The bulk density of the intermediate is controlled to less than about 0.1 g/cc to result in the silicon nitride having a crystal morphology which is essentially all fibrous, or the bulk density can be controlled to greater than about 0.3 g/cc to result in the silicon nitride having a crystal morphology which is essentially all equiaxial, or the bulk density can be controlled to between about 0.1 g/cc and about 0.3 g/cc to result in the silicon nitride having a crystal morphology which is a mixture of fibrous and equiaxial. The intermediate is then heated at a sufficient temperature for a sufficient time in a non-oxidizing atmosphere to produce the controlled crystal morphology silicon nitride.
A method for producing silicon nitride wherein the crystal morphology of said silicon nitride is controlled, said method comprising:
A method for producing silicon nitride wherein the crystal morphology of said silicon nitride is controlled, said method comprising:
Dependencies are inferred from the claim text.