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AssigneesKabushiki Kaisha Toshiba, Tokyo Kogaku Kikai Kabushiki Kaisha
InventorsKazuyoshi Sone, Katsuya Okumura, Tomio Nakajima, Kanji Ikegaya
Estimating the term…
A surface inspection apparatus is equipped with a transfer machine which includes a first storage unit for storing a plurality of wafers therein, a first transfer portion for receiving the wafers from the first storage unit one by one and transferring them along a horizontal plane, a first receiver moving vertically between a lower position and an upper position for receiving the wafers from the first transfer portion when the first receiver moves from its lower position to its upper position and moving them up and down, a chuck moving to a predetermined position under the wafers received by the first receiver when the first receiver is at or near its upper position and receiving the inspected elements from the first receiver when the first receiver moves from its upper position to its lower position, the chuck holding the wafers in their fixed condition and moving them in a given direction along a horizontal plane while they are inspected, a second receiver moving vertically between a lower position and an upper position for receiving the wafers from the chuck when the second receiver moves from its lower position to its upper position, a second transfer portion for receiving the wafers from the second receiver when the second receiver moves from its upper position to its lower position and transferring them along a horizontal plane, and a second storage unit for receiving the wafers from the second transfer portion and storing them therein.
A transfer machine for a surface inspection apparatus comprising:
A transfer machine for a surface inspection apparatus comprising:
A transfer machine for a surface inspection apparatus comprising:
A transfer machine for a surface inspection apparatus comprising:
An apparatus for inspecting a plurality of test articles, comprising a transfer machine for transferring the test articles, a source for radiating a laser beam to each of the test articles while the test article is transferred by the transfer machine, so that the laser beam can be reflected by each test article, means for detecting the laser beam reflected thereby and producing an electrical signal and a control means for receiving the electrical signal from the detecting means, wherein the transfer machine comprises:
A transfer machine as defined in claim 37, wherein the movable frame, the shaft, the motor and the chuck means are assembled as a unit which is movable between a first receiver means and a second receiver means.
Dependencies are inferred from the claim text.