Back to results
US 4,787,740 AGranted
Apparatus and method for determining crystal orientation
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsYasuo Inoue, Tadashi Nishimura, Kazuyuki Sugahara, Shigeru Kusunoki
Life of this patent
Estimating the term…
Abstract
An apparatus for determining crystal orientation comprises: a polarizer for polarizing an incident light beam; a polarization analyzer for selecting light having a selected polarization direction in Raman scattered light; and a synchronizer for enabling synchronous rotations of the polarizer and the polarization analyzer.
Claims8
An apparatus for determining crystal orientation, comprising:
- a light source for emitting an incident light beam;
- a spectroscopic filter through which the beam is passed;
- a polarizer for polarizing the beam;
- a lens for focusing the beam on a specimen in order to cause Raman scattered light;
- a polarization analyzer for selecting light having a selected polarization direction in said scattered light;
- means for enabling synchronous rotation of said polarizer and said polarization analyzer in phase with and at the same angular speed as each other;
- a depolarizer for depolarizing said scattered light;
- a spectrometer for separating said scattered light into spectral components thereof;
- a lens for focusing said scattered light on said spectrometer;
- a photodetector for detecting said spectral components of said scattered light and obtaining data;
- and
- a computer for processing said data to determine said crystal orientation.
9 more elements
A method for determining crystal orientation, comprising the steps of:
- passing an incident light beam through a spectroscopic filter;
- polarizing said incident light beam by a polarizer;
- focusing said beam on a specimen in order to cause Raman scattered light;
- selecting light having a selected polarization direction in said scattered light by a polarization analyzer;
- synchronizing rotation of said polarizer and said polarization analyzer to have the same angular speed and be in phase with each other;
- depolarizing said selected light;
- separating said depolarized light into spectral components thereof;
- detecting said spectral components and obtaining data;
- and
- processing said data by a computer to determine said crystal orientation.
7 more elements
An apparatus for determining crystal orientation, comprising:
- a light source for emitting an incident light beam at a first wavelength;
- a spectroscopic filter through which the beam is passed;
- a polarizer for polarizing the beam;
- a lens for focusing the beam on a specimen to cause Raman scattered light at a second wavelength different from the first wavelength;
- a polarization analyzer for selecting light having a selected polarization direction in said scattered light;
- means for enabling synchronous rotation of said polarizer and said polarization analyzer;
- a depolarizer for depolarizing said scattered light;
- a spectrometer for separating said scattered light into spectral components thereof;
- a lens for focusing said scattered light on said spectrometer;
- a photodetector for detecting said spectral components of said scattered light and obtaining data;
- and
- a computer for processing said data to determine said crystal orientation.
9 more elements
A method for determing crystal orientation, comprising the steps of:
- passing an incident light beam of a first wavelength through a spectroscopic filter;
- polarizing said incident light beam by a polarizer;
- focusing said beam on a specimen in order to cause Raman scattered light of a second wavelength different from the first wavelength;
- selecting light having a selected polarization direction in said scattered light by a polarization analyzer;
- synchronizing rotation of said polarizer and said polarization analyzer to each other;
- depolarizing said selected light;
- separating said depolarized light into spectral components thereof;
- detecting said spectral components and obtaining data;
- and
- processing said data by a computer to determine said crystal orientation.
7 more elements
Dependencies are inferred from the claim text.