Method of fabricating a contact type color image sensor
AssigneeFuji Xerox Co., Ltd.
InventorSadahiro Tei
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Abstract
A contact type color image sensor comprises a photoelectric converting section comprising a plurality of photoelectric converting elements of sandwich type in which a metallic electrode, a photoelectric converting layer and a light permeable electrode are sequentially formed on an elongated substrate, and a color filtering layer formed on a light receiving area of said photoelectric converting section, wherein said color filter layer comprises a dyeable polymer layer dyed a desirable color.
Claims14
A method of fabricating a contact type color image sensor at low temperature comprising the steps of forming a plurality of photoelectric converting elements having light receiving areas on a substrate;
- forming a passivation film on selected light receiving areas, forming a light shielding film on said passivation film by depositing a thin film of metal selected from the group consisting of Al, Cr, Au, Pt, Ru, or Mo and forming a color filter on other selected light receiving areas of each photoelectric converting element by forming a dyeable polymer layer and dyeing said dyeable polymer layer,
- wherein said step of forming said color filter comprises the steps of:
- forming a first relief pattern made of a dyeable polymer layer corresponding to a first group of said photoelectric converting elements,
- dyeing said first relief pattern,
- forming a first color filter by fixing said first relief pattern thus dyed,
- forming a second relief pattern made of a dyeable polymer layer corresponding to a second group of said photoelectric converting elements,
- dyeing said second relief pattern,
- and forming the second color filter by fixing said second relief pattern thus dyed.
A method of fabricating a contact type color image sensor comprising the steps of forming a plurality of photoelectric converting elements to be juxtaposed on an elongated substrate, and forming a color filter on a light receiving area of each photoelectric converting element, wherein said step of forming said color filter comprises the sequential steps of:
- forming a first relief pattern of a dyeable polymer layer corresponding to a first group of said photoelectric element,
- dyeing said relief pattern,
- forming a first color filter by fixing said first relief pattern thus dyed,
- forming a second relief pattern of a dyeable polymer layer corresponding to a second group of said photoelectric converting elements,
- dyeing said second relief pattern, and
- forming the second color filter by fixing said second relief pattern thus dyed.
A method of fabricating a contact type color image sensor comprising the steps of forming a plurality of photoelectric converting elements to be juxtaposed on an elongated substrate, forming a passivation film, and forming a color filter on a light receiving area of each photoelectric converting element, where said step of forming a color filter comprises the sequential steps of:
- forming a first relief pattern of a dyeable polymer layer on said passivation film of a first group of said photoelectric converting elements,
- dyeing said first relief pattern,
- forming a first color filter by fixing said first relief pattern thus dyed,
- forming a second relief pattern of a dyeable polymer layer on said passivation film of a second group of said photoelectric converting elements,
- dyeing said second relief pattern, and
- forming the second color filter by fixing said second relief pattern thus dyed.
Dependencies are inferred from the claim text.