US 4,786,802 AGranted

Apparatus for measuring photoelasticity

AssigneeHitachi, Ltd.

InventorsMasaki Yoshii, Shigeo Tohyama, Aizo Kaneda

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Abstract

An apparatus for measuring photoelasticity permitting to control mechanical stress applied to an elastic body, by visualizing phase differences of polarized light transmitted by the elastic body is disclosed. In such a prior art apparatus a quarter wavelength plate was used in order to obtain circularly polarized light. However, the precision of the circularly polarized light is worsened, when it works in a wide wavelength region. To the contrary, in an apparatus according to this invention, circularly polarized light is obtained by means of Fresnel's rhombic body. As the result good circularly polarized light can be obtained for a wide wavelength region from the visible region to the near infrared region and control of products including thin films and semiconductor substrates can be effected by visualizing mechanical stress therein.

Claims9

Dependent claims

Apparatus for measuring photoelasticity comprising:

a tungsten lamp:
means including a polarizer for linearly polarizing light emitted by said lamp to produce linearly polarized light;
means including a first Fresnel rhomb for transforming said linearly polarized light into a circularly polarized light beam;
a first concave lens means for enlarging the diameter of said circularly polarized light beam;
a first convex lens means for collimating the enlarged circularly polarized light beam to irradiate a specimen with a collimated circularly polarized light beam;
a second convex lens means for focusing the collimated circularly polarized light beam transmitted through said specimen;
a second concave lens means for transmitting the focused circularly polarized light beam to means incuding a second Fresnel rhomb;
said second Fresnel rhomb being effective to transform said circularly polarized light beam received from said second concave lens into linearly polarized light;
an analyzer means for detecting the phase difference of said light beam transmitted through said specimen;
and
a camera means for visualizing the light coming from said analyzer.

8 more elements

Apparatus for measuring photoelasticity comprising:

a halogen lamp for emitting light over a predetermined wavelength region;
means incuding a spectroscope for spectroscopically separating the light emitted by said lamp;
means including a polarizer for linearly polarizing light from said spectroscope to produce linearly polarized light;
means including a first pair of Fresnel rhombs provided for alternative use with one of said rhombs being used with a shorter wavelength portion and the other of said rhombs being used with a longer wavelength portion of said predetermined wavelength region, each of the Fresnel rhombs being effective to transform said linearly polarized light into a circularly polarized light beam;
a first concave lens means for enlarging the diameter of said circularly polarized light beam;
a first convex lens means for collimating the enlarged circularly polarized light beam to irradiate a specimen with a collimated circularly polarized light beam;
a second convex lens means for focusing the collimated circularly polarized light beam transmitted through said specimen;
a second concave lens means for transmitting focused circularly polarized light beam to means including a second pair of Fresnel rhombs;
said second pair of Fresnel rhombs being provided for alternative use corresponding to the use of the individual ones of said first pair of Fresnel rhombs, each of the Fresnel rhombs in said second pair being effective to transform said circularly polarized light beam received from said second concave lens into linearly polarized light;
an analyzer means for detecting the phase difference of said light beam transmitted through said specimen;
and
a camera means for visualizing the light coming from said analyzer.

9 more elements

Dependencies are inferred from the claim text.