Fixture for cleaning a plasma etcher
AssigneeUnisys Corporation
InventorsJames N. Kruchowski, Robert K. Sakurai
Life of this patent
Estimating the term…
Abstract
A fixture is provided which cleans a plasma etcher of a type that has a holding member with a surface which holds wafers that are to be etched, and an enclosing member which encloses the holding member to form a chamber for the plasma. This fixture operates to produce a large voltage change near the enclosing member and thereby enable the cleaning of the enclosing member by the plasma itself. To achieve such a large voltage change, the fixture is configured to fit inside of the enclosing member, provide a surface which is substantially larger than the surface of the holding member, and make electrical contact with the surface of the holding member. Preferably, the surface provided by the fixture is at least 50% larger than the surface of the holding member.
Claims10
A fixture, in combination with a plasma etcher which comprises a holding member with a surface which holds wafers that are to be etched, and an enclosing member which encloses said holding member to form a chamber for said plasma;
- said fixture operating to produce a large voltage gradient in said plasma near said enclosing member and thereby enable the cleaning of said enclosing member by said plasma;
- said fixture being configured to fit inside of said enclosing member, provide a metal surface which surrounds said holding member and is substantially larger than said surface of said holding member, and includes a means shorting said metal surface to said holding member.
A fixture, in combination with a plasma etcher in which the potentials within said etcher are related by the equation (A.sub.1 /A.sub.2).sup.4 .apprxeq.(V.sub.2 /V.sub.1) where A.sub.1 is a small surface which holds wafers that are to be etched, A.sub.2 is a large surface which encloses said plasma, V.sub.1 is a voltage change which occurs in said plasma near surface A.sub.1, and V.sub.2 is a voltage change which occurs in said plasma near surface A.sub.2 ;
- said fixture being configured to fit inside of the enclosure provided by surface A.sub.2, provide a metal surface which surrounds surface A.sub.1, and which is substantially larger than surface A.sub.1, and includes a metal conductor shorting said metal surface to said surface A.sub.1.
Dependencies are inferred from the claim text.