Apparatus for forming film
AssigneeCanon Kabushiki Kaisha
InventorsToshihiko Miyazaki, Etsuko Sugawa, Yoshinori Tomida, Hirohide Munakata, Yukuo Nishimura, Ken Eguchi
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Abstract
An apparatus is provided for forming a monomolecular film or a monomolecular layer built-up film on a substrate by spreading a group of monomolecular film-forming molecules on a liquid surface and contacting the substrate with the group of the monomolecular film-forming molecules. The apparatus comprises a frame for confining the spread liquid surface and structure for isolating and moving at least two different monomolecular layers on the spread liquid surface within the frame.
Claims5
An apparatus for forming on a substrate a heterogeneous built-up film made of different monomolecular layers, comprising:
- a vessel for holding a liquid;
- a frame located within the vessel for confining the surface of the liquid on which monomolecular layer-forming molecules are to be spread;
- a plurality of means for isolating on the liquid surface at least two monomolecular layers that differ from one another;
- means for moving each isolated monomolecular layer on said liquid surface while maintaining a surface pressure of said monomolecular layer at a desired value by moving said plurality of isolating means in the same direction;
- and
- means for transferring a moved monomolecular layer onto said substrate.
An apparatus for forming on a substrate a heterogeneous built-up film made of different monomolecular layers, comprising:
- a vessel for holding a liquid;
- a frame located within the vessel for confining a surface of the liquid on which monomolecular layer-forming molecules are to be spread, the geometry of both said vessel and said frame defining approximately circular regions;
- means for isolating on the liquid surface at least two monomolecular layers that differ from one another, said isolating means including at least one rotatable shaft;
- means for independently moving each of the different monomolecular layers, said moving means being responsive to rotation of said rotatable shaft;
- and
- means for transferring a moved monomolecular layer onto said substrate.
Dependencies are inferred from the claim text.