Gas laser device
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsMasaki Kuzumoto, Shigenori Yagi, Shuji Ogawa, Koji Yasui
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Abstract
A gas laser device comprises a discharge tube made of a dielectric material; a laser medium gas which is circulated at a high speed within the discharge tube in the axial direction of the discharge tube; an optical resonator composed of a total refelection mirror and a partial reflection mirror, both being disposed in mutual confrontation at both ends of the discharge tube; a plurality of electrodes oppositely provided on the outer periphery of the discharge tube; and a power source for applying an a.c. voltage to the oppositely provided electrodes to generate silent discharge.
Claims36
A gas laser device, which comprises in combination:
- (a) a discharge tube made of a dielectric material;
- (b) a laser medium gas which is circulated within said discharge tube in the axial direction thereof;
- (c) an optical resonator composed of mirrors disposed in mutual confrontation at both ends of said discharge tube;
- (d) a p lurality of electrodes provided on radially opposite sides of the outer periphery of said discharge tube;
- and
- (e) a power source for applying an a.c. voltage to said electrodes to generate silent discharge;
- (f) a metal piece provided in the vicinity of the discharge section and extending through said discharge tube wherein a trigger potential is applied to said metal piece through a capacitor to cause a trigger discharge.
A gas laser device, which comprises in combination;
- (a) a discharge tube made of a dielectric material;
- (b) a laser medium gas which is circulated within said discharge tube in the axial direction thereof;
- (c) an optical resonator composed of mirrors disposed in mutual confrontation at both ends of said discharge tube;
- (d) a pair of electrodes provided on radially opposite sides of the outer periphery of said discharge tube to provide a discharge path passing through the axial line of said tube;
- and
- (e) a power source for applying an a.c. voltage in a range of 50 Hz-1 MHz to said electrodes to generate silent discharge.
Dependencies are inferred from the claim text.